XY all-directional precision alignment platform
OwnerMau-Hsiang Wuinventor
Life of this patent
Estimating the term…
Abstract
An XY all-directional precision alignment platform is provided and includes an XY-axes moving platform including X-axis moving platform and Y-axis moving platform, the X-axis and Y-axis moving platforms being stacked together, and a θ-angle rotating platform, the θ-angle rotating platform stacked onto the carrier surface thereof; wherein the θ-angle rotating platform is driven to perform precise θ-angle rotation achieving 360° and is of a four-layered thickness only, achieving the goal of having a light and thin product.
Claims12
An XY all-directional precision alignment platform comprising:
- an XY-axes moving platform provided on a base surface of a base, comprising:
- an X-axis moving platform, having at least one guideway unit on a bottom thereof;
- a Y-axis moving platform, having at least one guideway unit on a bottom thereof;
- said X-axis moving platform and said-Y axis moving platform being stacked together in combination, wherein said Y-axis moving platform is parallel to and movably disposed on said base;
- a θ-angle rotating platform, comprising:
- a platform;
- an arcuate gear, provided on a bottom of said platform;
- a guideway unit, attached to at least one sliding block;
- a worm shaft mechanism, engaged correspondingly with said arcuate gear;
- said guideway unit and said worm shaft mechanism being arranged corresponding to a carrier surface of said XY-axes moving platform;
- said θ-angle rotating platform stacked onto said carrier surface of said XY-axes moving platform, and said sliding block attached correspondingly to said bottom of said platform;
- wherein said arcuate gear is fixedly attached to said bottom of said platform of said θ-angle rotating platform;
- wherein said platform of said θ-angle rotating platform and said arcuate gear are rotatable about an axis perpendicular to said X-axis moving platform, said Y-axis moving platform and said platform of said θ-angle rotating platform;
- wherein said worm shaft mechanism is driven by a driving device, and said driving device is located between said platform of said θ-angle rotating platform and said base;
- wherein said driving device is disposed to correspond to a side surface of said guideway unit which faces radially.
A θ-angle rotating platform of an XY all-directional precision alignment platform, comprising:
- a platform,
- an arcuate gear, provided on a bottom of said platform;
- a guideway unit, attached to at least one sliding block;
- said bottom of said platform attached correspondingly to said sliding block;
- said platform being driven by a worm shaft mechanism engaged with said arcuate gear;
- wherein said arcuate gear is fixedly attached to said bottom of said platform, said platform and said arcuate gear are rotatable about an axis perpendicular to said platform;
- wherein said worm shaft mechanism is driven by a driving device, and said driving device is disposed to correspond to a side surface of said guideway unit which faces radially.
Dependencies are inferred from the claim text.