Circuit structure of test-key and test method thereof
AssigneeUnited Microelectronics Corp.
InventorChing-Yu Tso
Life of this patent
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AssigneeUnited Microelectronics Corp.
InventorChing-Yu Tso
Estimating the term…
A circuit structure of a test-key and a test method thereof are provided. The circuit structure comprises a plurality of transistors, a first conductive contact, a plurality of second conductive contacts and a plurality of third conductive contacts. The transistors are arranged in a matrix. The first conductive contact is electrically connected to one source/drain of each transistor in each column of the matrix. Each second conductive contact is electrically connected to the other source/drain of each transistor in a corresponding column of the matrix. Each third conductive contact is electrically connected to the gate of each transistor in a corresponding row of the matrix. In the method, a plurality of driving pulses are provided to the third conductive contacts in sequence, and a plurality of output signals are read from the second conductive contacts to perform an element-character analyzing operation when a row of the transistors is turned on.
A test method of a test-key, the circuit structure of the test-key comprising a plurality of transistors, a first conductive contact pad, a plurality of second conductive contact pads and a plurality of third conductive contact pads, the transistors being arranged in a matrix, the first conductive contact pad being electrically coupled to a first source/drain terminal of each of the transistors in each column of the matrix, each of the second conductive contact pads being electrically coupled to a second source/drain terminal of each of the transistors in a corresponding column of the matrix, and each of the third conductive contact pads being electrically coupled to a gate terminal of each of the transistors in a corresponding row of the matrix, the test method comprising:
Dependencies are inferred from the claim text.