Radiation-sensitive composition, and compound
AssigneeJsr Corporation
InventorKen Maruyama
Life of this patent
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Abstract
A radiation-sensitive composition includes a compound represented by a formula (1), and a polymer having a structural unit that includes an acid-labile group. In the formula (1), R1 represents a group having a polar group; n is an integer of 1 to 4, wherein, in a case where R1 is present in a plurality of number, the plurality of R1s are identical or different, and optionally at least two R1s taken together represent a cyclic structure; A represents an alicyclic hydrocarbon group having a valency of (n+1); and M+ represents a monovalent onium cation.
Claims8
A radiation-sensitive composition comprising:
- a compound represented by a formula (1-A-1), a compound represented by a formula (1-B-1), or both thereof;
- and
- a polymer comprising a structural unit that comprises an acid-labile group:
- wherein, in the formulae (1-A-1) and (1-B-1),
- M+ is a monovalent onium cation;
- and
- R2, R3, R4 and R5 each independently represent a linear or branched hydrocarbon group having 1 to 30 carbon atoms, an alicyclic hydrocarbon group having 3 to 30 carbon atoms, an aromatic hydrocarbon group having 6 to 30 carbon atoms, or a heterocyclic group having 4 to 30 carbon atoms,
- wherein a part or all of hydrogen atoms included in the linear or branched hydrocarbon group having 1 to 30 carbon atoms are substituted with at least one of an aromatic hydrocarbon group or an alicyclic hydrocarbon group,
- wherein the linear or branched hydrocarbon group having 1 to 30 carbon atoms does not include or includes an ester group, an amide group, a urethane group, a urea group, a carbonate group or a sulfide group between carbon atoms, and
- wherein a part or all of hydrogen atoms included in the alicyclic hydrocarbon group, the aromatic hydrocarbon group and the heterocyclic group represented by R2, R3, R4 and R5 are not substituted or substituted.
A compound represented by a formula (1-A-1) or (1-B-1):
- wherein, in the formulae (1-A-1) and (1-B-1),
- M+ is a monovalent onium cation;
- and
- R2, R3, R4 and R5 each independently represent a linear or branched hydrocarbon group having 1 to 30 carbon atoms, an alicyclic hydrocarbon group having 3 to 30 carbon atoms, an aromatic hydrocarbon group having 6 to 30 carbon atoms, or a heterocyclic group having 4 to 30 carbon atoms,
- wherein a part or all of hydrogen atoms included in the linear or branched hydrocarbon group having 1 to 30 carbon atoms are substituted with at least one of an aromatic hydrocarbon group or an alicyclic hydrocarbon group,
- wherein the linear or branched hydrocarbon group having 1 to 30 carbon atoms does not include or includes an ester group, an amide group, a urethane group, a urea group, a carbonate group or a sulfide group between carbon atoms, and
- wherein a part or all of hydrogen atoms included in the alicyclic hydrocarbon group, the aromatic hydrocarbon group and the heterocyclic group represented by R2, R3, R4 and R5 are not substituted or substituted.
Dependencies are inferred from the claim text.