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US 9,023,581 B2Granted
Resist composition, method of forming resist pattern, polymeric compound, and compound
AssigneeTokyo Ohka Kogyo Co., Ltd.
InventorsAkiya Kawaue, Kazushige Dohtani, Yoshiyuki Utsumi, Jun Iwashita, Kenri Konno, Daiju Shiono, Daichi Takaki
Life of this patent
Estimating the term…
Abstract
A resist composition which can form a very fine resist pattern with excellent lithography properties, a new polymeric compound useful for the resist composition, and a compound useful as a monomer for the polymeric compound. The resist composition contains a polymeric compound containing a structural unit (a0) represented by general formula (a0) shown below. In the formula (a0), A is an anion represented by the general formula (1) or (2).
Claims14
A resist composition which exhibits changed solubility in an alkali developing solution upon exposure, comprising:
- a polymeric compound (A) having a structural unit (a0) represented by general formula (a0) shown below:
- wherein R represents a hydrogen atom, an alkyl group of 1 to 5 carbon atoms or a halogenated alkyl group of 1 to 5 carbon atoms;
- R1 represents a divalent aromatic cyclic group;
- each of R2 and R3 independently represents an aryl group with or without a substituent, an alkyl group with or without a substituent or an alkenyl group with or without a substituent, wherein R2 and R3 may be mutually bonded to form a ring with the sulfur atom;
- L1 represents a single bond or a divalent linking group;
- and A represents an anion represented by general formula (11a), (11b), (11c), (11e), (11f), (12a), (12b), (12c), (12d) or (2) shown below:
- wherein in formula (11a), X10 represents an —S(═O)2— containing cyclic group, p represents an integer of 1 to 3, and Q12 represents a single bond or an alkylene group;
- in formula (11b), X10 represents a hydrocarbon group of 3 to 30 carbon atoms with or without a substituent, p represents an integer of 1 to 3, and Q13 represents an alkylene group;
- in formula (11c), p represents an integer of 1 to 3, X10′ represents a fluorinated aryl group with or without a substituent, and Q14 represents a single bond or an alkylene group;
- in formula 11e), X10 represents a hydrocarbon group of 3 to 30 carbon atoms with or without a substituent, p represents an integer of 1 to 3, Q16 represents an alkylene group, and Q17 represents a methylene group;
- in formula (11f), X10 represents a hydrocarbon group of 3 to 30 carbon atoms with or without a substituent, p represents an integer of 1 to 3, and Q13′ represents an alkylene group
- in the formulae (12a), (12b), (12c) and (12d), R7″ represents a substituent, w01 represents an integer of 0 to 7, w02 represents an integer of 0 to 5, w03 represents an integer of 0 to 15, each of v01 to v04 independently represents an integer of 0 to 5, and pp represents an integer of 1 to 3;
- and in formula (2), R6 represents an alkyl group with or without a substituent or a fluorinated alkyl group with or without a substituent;
- L3 represents a single bond or a divalent linking group;
- Y10 represents a —CO—;
- and R7 represents a hydrocarbon group with or without a substituent.
13 more elements
A polymeric compound comprising a structural unit (a0) represented by general formula (a0) shown below:
- wherein R represents a hydrogen atom, an alkyl group of 1 to 5 carbon atoms or a halogenated alkyl group of 1 to 5 carbon atoms;
- R1 represents a divalent aromatic cyclic group;
- each of R2 and R3 independently represents an aryl group with or without a substituent, an alkyl group with or without a substituent or an alkenyl group with or without a substituent, wherein R2 and R3 may be mutually bonded to form a ring with the sulfur atom;
- L1 represents a single bond or a divalent linking group;
- and A represents an anion represented by general formula (11a), (11b ), (11c), (11e), (11f), (12a), (12b), (12c), (12d) or (2) shown below:
- wherein in formula (11a), X10 represents an —S(═O)2— containing cyclic group, p represents an integer of 1 to 3, and Q12 represents a single bond or an alkylene group;
- in formula (11b), represents a hydrocarbon group of 3 to 30 carbon atoms with or without a substituent, p represents an integer of 1 to 3, and Q13 represents an alkylene group;
- in formula (11c), p represents an integer of 1 to 3, X10′ represents a fluorinated aryl group with or without a substituent, and Q14 represents a single bond or an alkylene group;
- in formula (11e), X10 represents a hydrocarbon group of 3 to 30 carbon atoms with or without a substituent, p represents an integer of 1 to 3,Q16 represents an alkylene group, and Q17 represents a methylene group;
- in formula (11f), X represents a hydrocarbon group of 3 to 30 carbon atoms with or without a substituent, p represents an integer of 1 to 3,and Q13′ represents an alkylene group
- in the formulae (12a), (12b), (12c) and (12d), R7″ represents a substituent, w01 represents an integer of 0 to 7, w02 represents an integer of 0 to 5, w03 represents an integer of 0 to 15, each of v01 to v04 independently represents an integer of 0 to 5, and pp represents an integer of 1 to 3;
- and in formula (2), R6 represents an alkyl group with or without a substituent or a fluorinated alkyl group with or without a substituent;
- L3 represents a single bond or a divalent linking group;
- Y10 represents a —CO—;
- and R7 represents a hydrocarbon group with or without a substituent.
12 more elements
A compound represented by general formula (I) shown below:
- wherein R represents a hydrogen atom, an alkyl group of 1 to 5 carbon atoms or a halogenated alkyl group of 1 to 5 carbon atoms;
- R1 represents a divalent aromatic cyclic group;
- each of R2 and R3 independently represents an aryl group with or without a substituent, an alkyl group with or without a substituent or an alkenyl group with or without a substituent, wherein R2 and R3 may be mutually bonded to form a ring with the sulfur atom;
- L1 represents a single bond or a divalent linking group;
- and A represents an anion represented by general formula (11a), (11b), (11c), (11e), (11f), (12a), (12b), (12c), (12d) or (2) shown below:
- wherein in formula (11a), X10 represents an —S(═O)2— containing cyclic group, p represents an integer of 1 to 3,and Q12 represents a single bond or an alkylene group;
- in formula (11b), X10 represents a hydrocarbon group of 3 to 30 carbon atoms with or without a substituent, p represents an integer of 1 to 3,and Q13 represents an alkylene group;
- in formula (11c), p represents an integer of 1 to 3, X10′ represents a fluorinated aryl group with or without a substituent, and Q14 represents a single bond or an alkylene group;
- in formula (11e), X10 represents a hydrocarbon group of 3 to 30 carbon atoms with or without a substituent, p represents an integer of 1 to 3, Q16 represents an alkylene group, and Q17 represents a methylene group;
- in formula (11f), X10 represents a hydrocarbon group of 3 to 30 carbon atoms with or without a substituent, p represents an integer of 1 to 3,and Q13′ represents an alkylene group
- in the formulae (12a), (12b), (12c) and (12d), R7″ represents a substituent, w01 represents an integer of 0 to 7, w02 represents an integer of 0 to 5, w03 represents an integer of 0 to 15, each of v01 to v04 independently represents an integer of 0 to 5, and pp represents an integer of 1 to 3;
- and in formula (2), R6 represents an alkyl group with or without a substituent or a fluorinated alkyl group with or without a substituent;
- L3 represents a single bond or a divalent linking group;
- Y10 represents a —CO—;
- and R7 represents a hydrocarbon group with or without a substituent.
12 more elements
Dependencies are inferred from the claim text.