Pressure sensor chip
AssigneeAzbil Corporation
InventorsYuuki Seto, Tomohisa Tokuda
Life of this patent
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Abstract
A pressure sensor chip includes a sensor diaphragm that outputs a signal in accordance with a pressure differential, and first and second holding members that face, on peripheral edge portions thereof, one face and another face of a sensor diaphragm, and are in contact therewith. In the peripheral edge portion of the first holding member, in a region that faces the one face of the sensor diaphragm, a region on an outer peripheral side is a region that is bonded to the one face of the sensor diaphragm, and a region on an inner peripheral side is a region that is not bonded to the one face of the sensor diaphragm.
Claims5
A pressure sensor chip comprising:
- a sensor diaphragm that outputs a signal in accordance with a pressure differential;
- and
- first and second holding members that face, on peripheral edge portions thereof, one face and another face of a sensor diaphragm, and are in contact therewith, wherein,
- in the peripheral edge portion of the first holding member, in a region that faces the one face of the sensor diaphragm,
- a region on an outer peripheral side is a region that is bonded to the one face of the sensor diaphragm, and
- a region on an inner peripheral side is a region that is not bonded to the one face of the sensor diaphragm.
Dependencies are inferred from the claim text.