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US 9,018,649 B2Granted
Method of producing nanopatterned articles, and articles produced thereby
OwnerThomas P. Russell, Soojin Park +1inventors
InventorsThomas P. Russell, Soojin Park, Ting Xu
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Abstract
A nanopatterned surface is prepared by forming a block copolymer film on a miscut crystalline substrate, annealing the block copolymer film, then reconstructing the surface of the annealed block copolymer film The method creates a well-ordered array of voids in the block copolymer film that is maintained over a large area. The nanopatterned block copolymer films can be used in a variety of different applications, including the fabrication of high density data storage media.
Claims7
A layered article prepared by a method comprising:
- forming a block copolymer film on an annealed, miscut surface of a crystalline substrate;
- wherein the block copolymer film comprises a major phase and a minor phase;
- and wherein the block copolymer film comprises a bottom surface in contact with the annealed, miscut surface of the crystalline substrate, and a top surface not in contact with the annealed, miscut surface of the crystalline substrate;
- annealing the block copolymer film;
- and
- surface reconstructing the annealed block copolymer film so that the minor phase migrates to the top surface of the block copolymer film, thereby forming voids in the block copolymer film
3 more elements
Dependencies are inferred from the claim text.