US 9,015,861 B2Granted

Modification of atomic force microscopy tips by deposition of nanoparticles with an aggregate source

AssigneeConsejo Superior De Investigaciones Cientificas (Csic)

InventorsElisa Leonor Román García, Lidia Martínez Orellana, Mercedes Díaz Lagos, Yves Huttel

Life of this patent

Estimating the term…

Abstract

The present invention relates to a method for covering Atomic Force Microscopy (AFM) tips by depositing a material in the form of nanoparticles with an aggregate source.

Claims8

Dependent claims

A method for coating at least one AFM tip comprising the step of coating the at least one AFM tip by means of ion cluster source technique with a material for coating in the form of spherical nanoparticles in three dimensions with a controlled size.

Dependencies are inferred from the claim text.

Facts

Application: 13/697,598Filed 4 May 2011
Priority: ES 20103071213 May 2010
Published: US 2013/0111637 A12 May 2013
Granted: 21 Apr 2015
Term ends: Not estimatedThe source records don’t support an estimate.

Classification9 codes

G01Q 60/38
AFM [Atomic Force Microscopy] or apparatus therefor, e.g. AFM probes: probes, their manufacture, or their related instrumentation, e.g. holders
C23C 14/22
Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material: characterised by the process of coating
G01Q 60/42
Probes, their manufacture, or their related instrumentation, e.g. holders: functionalisation
B82Y 15/00
Nanotechnology for interacting, sensing or actuating

Family

US 2013/0111637 A1Pre-grant publication · published 2 May 2013
US 9,015,861 B2This patent

From the US filing history. Foreign family members aren’t listed.

Timeline

Citations

Open elsewhere

patentgrep

Loading patent…

patentgrepSearch patents

Back to results