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US 9,013,025 B2Granted
Inductor device and semiconductor device
AssigneeRenesas Electronics Corporation
InventorsShinichi Uchida, Yasutaka Nakashiba
Life of this patent
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Abstract
An inductor device includes an insulation layer, an inductor, fixed electrodes, and a movable electrode. The inductor is formed on the insulation layer. The fixed electrodes are provided in positions which do not overlap with the inductor in a planar view. The movable electrode overlaps with the inductor and the fixed electrodes in the planar view, and is separated from the inductor and the fixed electrodes. Further, the movable electrode includes first openings.
Claims9
An inductor device comprising:
- an insulation layer;
- an inductor that is formed over the insulation layer;
- fixed electrodes that are provided in positions which do not overlap with the inductor in a planar view;
- and
- a movable electrode that is configured to overlap with the inductor and the fixed electrodes in the planar view, that is separated from the inductor and the fixed electrodes, and that is configured to include first openings.
2 more elements
A semiconductor device comprising:
- a substrate;
- semiconductor elements that are formed over the substrate;
- a multi-wiring layer that is formed over the substrate and the semiconductor elements;
- an inductor that is formed in any wiring layer of the multi-wiring layer;
- fixed electrodes that are formed in any wiring layer of the multi-wiring layer and that do not overlap with the inductor in a planar view;
- and
- a movable electrode that is positioned over an upper side of the multi-wiring layer, that is configured to overlap with the inductor and the fixed electrodes in the planar view, and that is configured to include first openings.
4 more elements
Dependencies are inferred from the claim text.