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US 9,012,867 B2Granted
Ion sources, systems and methods
AssigneeCarl Zeiss Microscopy GmbH
InventorsBilly W. Ward, John A. Notte, IV, Louis S. Farkas, Randall G. Percival, Raymond Hill, Klaus Edinger, Lars Markwort, Dirk Aderhold, Ulrich Mantz
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Abstract
Ion sources, systems and methods are disclosed.
Claims20
A method, comprising:
- forming an electrically conductive tip of a gas field ion source when the gas field ion source is present within an ion microscope;
- wherein the method comprises:
- operating the electrically conductive gas field ion microscope in a first mode in which a field emission pattern of the tip is captured as an image, and operating the gas field ion microscope in a second mode in which an image of a sample is recorded by scanning the sample with an ion beam generated by the gas field ion source and detecting particles generated due to interaction of the ion beam with the sample.
A system, comprising:
- a gas field ion source,
- wherein the system is configured so that:
- in a first mode, the system images the gas field ion source;
- and
- in a second mode, the gas field ion source interacts with a gas to generate an ion beam which interacts with a sample to generate particles which are detected to provide information regarding the sample.
2 more elements
Dependencies are inferred from the claim text.