Resist composition, method of forming resist pattern, novel compound, and acid generator
AssigneeTokyo Ohka Kogyo Co., Ltd.
InventorsHideo Hada, Yoshiyuki Utsumi, Takehiro Seshimo, Akiya Kawaue
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AssigneeTokyo Ohka Kogyo Co., Ltd.
InventorsHideo Hada, Yoshiyuki Utsumi, Takehiro Seshimo, Akiya Kawaue
Estimating the term…
A resist composition including a base component (A) which exhibits changed solubility in an alkali developing solution under action of acid and an acid-generator component (B) including a compound represented by (b1-1), a compound represented by (b1-1′) and/or a compound represented by (b1-1″) (R1″-R3″ represents an aryl group or an alkyl group, provided that at least one of R1″-R3″ represents a substituted aryl group being substituted with a group represented by (b1-1-0), and two of R1″-R3″ may be mutually bonded to form a ring with the sulfur atom; X represents a C3-C30 hydrocarbon group; Q1 represents a carbonyl group-containing divalent linking group; X10 represents a C1-C30 hydrocarbon group; Q3 represents a single bond or a divalent linking group; Y10 represents —C(═O)— or —SO2—; Y11 represents a C1-C10 alkyl group or a fluorinated alkyl group: Q2 represents a single bond or an alkylene group; and W represents a C2-C10 alkylene group).
A resist composition comprising a base component (A) which exhibits changed solubility in an alkali developing solution under action of acid and an acid-generator component (B) which generates acid upon exposure,
A compound comprising a compound (B1′) represented by formula (b1-1′) shown below:
Dependencies are inferred from the claim text.