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US 9,005,871 B2Granted
Sulfonium derivatives and the use therof as latent acids
AssigneeBASF SE
InventorsHitoshi Yamato, Toshikage Asakura, Yuichi Nishimae
Life of this patent
Estimating the term…
Abstract
Compounds of the formula (I), wherein Ar1 is for example phenylene or biphenylene both unsubstituted or substituted; Ar2 and Ar3 are for example independently of each other phenyl, naphthyl, biphenylylyl or heteroaryl, all optionally substituted; or Ar1 and Ar2 for example together with a direct bond, O, S or (CO), form a fused ring system; R is for example hydrogen, C3-C30cycloalkyl or C1-C18alkyl; and R1, R2 and R3 independently of each other are for example C1-C10haloalkyl; are effective photoacid generators (PAG).
Claims18
A compound of the formula I
- wherein
- Ar1 is phenylene, naphthylene, or heteroarylene,
- wherein the phenylene, naphthylene, or heteroarylene, are unsubstituted or are substituted by one or more C3-C30cycloalkyl, C1-C18alkyl, C1-C10haloalkyl, C2-C12alkenyl, C4-C30cycloalkenyl, phenyl-C1-C3-alkyl,
- or are substituted by C2-C18alkyl which is interrupted by one or more O, S, NR7, O(CO), (CO)O, (CO)NR7 or NR7(CO),
- or are substituted by C3-C30cycloalkyl which is interrupted by one or more O, S, NR7, O(CO), (CO)O, (CO)NR7 or NR7(CO),
- or are substituted by C4-C30cycloalkenyl which is interrupted by one or more O, S, NR7, O(CO), (CO)O, (CO)NR7 or NR7(CO),
- or are substituted by one or more halogen, NO2, CN, Ar, (CO)R8, (CO)OR4, (CO)NR5R6, O(CO)R8, O(CO)OR4, O(CO)NR5R6, NR7(CO)R8, NR7(CO)OR4, OR4, NR5R6, SR7, SOR8, SO2R8 or —OSO2R8,
- wherein optionally the substituents C1-C18alkyl, C2-C12alkenyl, (CO)R8, (CO)OR4, (CO)NR5R6, O(CO)R8, O(CO)OR4, O(CO)NR5R6, NR7(CO)R8, NR7(CO)OR4, OR4, NR5R6, SR7, SOR8, SO2R8 or OSO2R8 form 5-, 6- or 7-membered rings, via the radicals C1-C18alkyl, C2-C12alkenyl, R4, R5, R6, R7 and/or R8, with further substituents on the phenylene, naphthylene, or heteroarylene, or with one of the carbon atoms of the phenylene, naphthylene, or heteroarylene;
- wherein all Ar1 optionally additionally are substituted by a group having a —O—C-bond or a —O—Si-bond which cleaves upon the action of an acid;
- Ar2 and Ar3 independently of each other are phenyl, naphthyl, biphenylyl or heteroaryl, wherein the phenyl, naphthyl, biphenylyl or heteroaryl are unsubstituted or are substituted by one or more C3-C30cycloalkyl, C1-C18alkyl, C1-C10haloalkyl, C2-C12alkenyl, C4-C30cycloalkenyl, phenyl-C1-C3-alkyl,
- or by C2-C18alkyl which is interrupted by one or more O, S, NR7, O(CO), (CO)O, (CO)NR7 or NR7(CO),
- or by C3-C30cycloalkyl which is interrupted by one or more O, S, NR7, O(CO), (CO)O, (CO)NR7 or NR7(CO),
- or by C4-C30cycloalkenyl which is interrupted by one or more O, S, NR7, O(CO), (CO)O, (CO)NR7 or NR7(CO),
- or are substituted by one or more halogen, NO2, CN, Ar, O(CO)R8, O(CO)OR4, O(CO)NR5R6, NR7(CO)R8, NR7(CO)OR4, OR4, NR5R6, SR7, SOR8, SO2R8 or OSO2R8, optionally the substituents C1-C18alkyl, C2-C12alkenyl, O(CO)R8, O(CO)OR4, O(CO)NR5R6, NR7(CO)R8, NR7(CO)OR4, OR4, NR5R6, SR7, SOR8, SO2R8 or OSO2R8 form 5-, 6- or 7-membered rings, via the radicals C1-C18alkyl, C2-C12alkenyl, R4, R5, R6, R7 and/or R8, with further substituents on the phenyl, naphthyl, biphenylyl or heteroaryl or with one of the carbon atoms of the phenyl, naphthyl, biphenylyl or heteroaryl;
- or Ar1 and Ar2 together with a direct bond, O, S, NR7 or (CO), form a fused ring system;
- or Ar1 and Ar2 together with C1-C2alkylene, O, S, NR7 or (CO), form a 5-, 6-, or 7-membered ring;
- or Ar2 and Ar3 together with a direct bond, O, S, NR7 or (CO) form a fused ring system;
- or Ar2 and Ar3 together with C1-C2alkylene, O, S, NR7 or (CO), form a 5-, 6-, or 7-membered ring;
- or Ar1 and Ar2 together with the
- which is attached to the Ar1, form
- wherein all Ar2 and Ar3 optionally additionally are substituted by a group having a —O—C— bond or a —O—Si-bond which cleaves upon the action of an acid;
- R is Ar;
- R1, R2 and R3 independently of each other are C1-C10haloalkyl or Ar, or independently of each other are C2-C10haloalkyl which is interrupted by one or more O, S, NR7, O(CO), (CO)O, (CO)NR7 or NR7(CO),
- wherein R1, R2 and R3 as C1-C10haloalkyl, Ar and interrupted C2-C10haloalkyl are unsubstituted or substituted by one or more NO2, CN, Ar, (CO)R8, (CO)OR4, (CO)NR5R6, O(CO)R8, O(CO)OR4, O(CO)NR5R6, NR7(CO)R8, NR7(CO)OR4, OR4, NR5R6, SR7, SOR8, SO2R8 or OSO2R8;
- or R1 and R2, together with the
- to which they are attached, form a 5-, 6- or 7-membered ring which optionally is interrupted by one or more O, NR7 or CO;
- R4 is hydrogen, C3-C30cycloalkyl, C1-C18alkyl, C1-C10haloalkyl, C2-C12alkenyl, C4-C30cycloalkenyl, phenyl-C1-C3-alkyl,
- or is C2-C18alkyl which is interrupted by one or more O, S, NR7, O(CO), (CO)O, (CO)NR7 or NR7(CO),
- or is C3-C30cycloalkyl which is interrupted by one or more O, S, NR7, O(CO), (CO)O, (CO)NR7 or NR7(CO),
- or is C4-C30cycloalkenyl which is interrupted by one or more O, S, NR7, O(CO), (CO)O, (CO)NR7 or NR7(CO),
- or R4 is Ar, (CO)R8, (CO)OR8, (CO)NR5R6 or SO2R8,
- wherein R4 as C3-C30cycloalkyl, C1-C18alkyl, C1-C10haloalkyl, C2-C12alkenyl, C4-C30cycloalkenyl, phenyl-C1-C3-alkyl, interrupted C2-C18alkyl, interrupted C3-C30cycloalkyl, interrupted C4-C30cycloalkenyl and Ar is unsubstituted or substituted by one or more Ar, OH, C1-C18alkyl, C1-C10haloalkyl, phenyl-C1-C3-alkyl, C3-C30cycloalkyl, halogen, NO2, CN, C1-C18alkoxy, phenoxy, phenoxycarbonyl, phenylthio, phenylthiocarbonyl, NR5R6, C1-C12alkylthio, C2-C18alkoxycarbonyl, C2-C10haloalkanoyl, halobenzoyl, C1-C18alkylsulfonyl, phenylsulfonyl, (4-methylphenyl)sulfonyl, C1-C18alkylsulfonyloxy, phenylsulfonyloxy, (4-methylphenyl)sulfonyloxy, C2-C18alkanoyl, C2-C18alkanoyloxy, benzoyl or by benzoyloxy;
- R5 and R6 independently of each other are hydrogen, C3-C30cycloalkyl, C1-C18alkyl, C1-C10haloalkyl, C2-C12alkenyl, C4-C30cycloalkenyl, phenyl-C1-C3-alkyl,
- or independently of each other are C2-C18alkyl which is interrupted by one or more O, S, NR7, O(CO), (CO)O, (CO)NR7 or NR7(CO),
- or independently of each other are C3-C30cycloalkyl which is interrupted by one or more O, S, NR7, O(CO), (CO)O, (CO)NR7 or NR7(CO),
- or independently of each other are C4-C30cycloalkenyl which is interrupted by one or more O, S, NR7, O(CO), (CO)O, (CO)NR7 or NR7(CO),
- or R5 and R6 independently of each other are Ar, (CO)R8, (CO)OR4 or —SO2R8,
- wherein R5 and R6 as C3-C30cycloalkyl, C1-C18alkyl, C1-C10haloalkyl, C2-C12alkenyl, C4-C30cycloalkenyl, phenyl-C1-C3-alkyl, interrupted C2-C18alkyl, interrupted C3-C30cycloalkyl, interrupted C4-C30cycloalkenyl and Ar are unsubstituted or substituted by one or more Ar, OH, C1-C18alkyl, C1-C10haloalkyl, phenyl-C1-C3-alkyl, C3-C30cycloalkyl, halogen, NO2, CN, C1-C18alkoxy, phenoxy, phenoxycarbonyl, phenylthio, phenylthiocarbonyl, C1-C18dialkylamino, C1-C12alkylthio, C2-C18alkoxycarbonyl, C2-C10haloalkanoyl, halobenzoyl, C1-C18alkylsulfonyl, phenylsulfonyl, (4-methylphenyl)sulfonyl, C1-C18alkylsulfonyloxy, phenylsulfonyloxy, (4-methylphenyl)sulfonyloxy, C2-C18alkanoyl, C2-C18alkanoyloxy, benzoyl or by benzoyloxy;
- or R5 and R6, together with the nitrogen atom to which they are attached, form a 5-, 6- or 7-membered ring which optionally is interrupted by one or more O, NR7 or CO;
- R7 is hydrogen, C3-C30cycloalkyl, C1-C18alkyl, C1-C10haloalkyl, C2-C12alkenyl, C4-C30cycloalkenyl, phenyl-C1-C3-alkyl,
- or is C2-C18alkyl which is interrupted by one or more O, S, O(CO) or (CO)O,
- or is C3-C30cycloalkyl which is interrupted by one or more O, S, O(CO) or (CO)O,
- or is C4-C30cycloalkenyl which is interrupted by one or more O, S, O(CO) or (CO)O;
- or R7 is Ar, (CO)R8, (CO)OR4, (CO)NR5R6 or SO2R8,
- wherein R7 as C3-C30cycloalkyl, C1-C18alkyl, C1-C10haloalkyl, C2-C12alkenyl, C4-C30cycloalkenyl, phenyl-C1-C3-alkyl, interrupted C2-C18alkyl, interrupted C3-C30cycloalkyl, interrupted C4-C30cycloalkenyl and Ar is unsubstituted or substituted by one or more Ar, OH, C1-C18alkyl, C1-C10haloalkyl, phenyl-C1-C3-alkyl, C3-C30cycloalkyl, halogen, NO2, CN, C1-C18alkoxy, phenoxy, phenoxycarbonyl, phenylthio, phenylthiocarbonyl, NR5R6, C1-C12alkylthio, C2-C18alkoxycarbonyl, C2-C10halolkanoyl, halobenzoyl, C1-C18alkylsulfonyl, phenylsulfonyl, (4-methylphenyl)sulfonyl, C1-C18alkylsulfonyloxy, phenylsulfonyloxy, (4-methylphenyl)sulfonyloxy, C2-C18alkanoyl, C2-C18alkanoyloxy, benzoyl or by benzoyloxy;
- R8 is hydrogen, C3-C30cycloalkyl, C1-C18alkyl, C1-C10haloalkyl, C2-C12alkenyl, C4-C30cycloalkenyl, phenyl-C1-C3-alkyl, Ar, NR5R6,
- or is C2-C18alkyl which is interrupted by one or more O, S, NR, O(CO), (CO)O, (CO)NR7 or NR7(CO),
- or is C3-C30cycloalkyl which is interrupted by one or more O, S, NR7, CO, O(CO), (CO)O, (CO)NR7 or NR7(CO),
- or is C4-C30cycloalkenyl which is interrupted by one or more O, S, NR7, O(CO), (CO)O, (CO)NR7 or NR7(CO),
- wherein R8 as C3-C30cycloalkyl, C1-C18alkyl, C1-C10haloalkyl, C2-C12alkenyl, C4-C30cycloalkenyl, phenyl-C1-C3-alkyl, Ar interrupted C2-C18alkyl, interrupted C3-C30cycloalkyl and interrupted C4-C30cycloalkenyl is unsubstituted or substituted by one or more Ar, OH, C1-C18alkyl, C1-C10haloalkyl, phenyl-C1-C3-alkyl, C3-C30cycloalkyl, halogen, NO2, CN, C1-C18alkoxy, phenoxy, phenoxycarbonyl, phenylthio, phenylthiocarbonyl, NR5R6, C1-C12alkylthio, C2-C18alkoxycarbonyl, C2-C10haloalkanoyl, halobenzoyl, C1-C18alkylsulfonyl, phenylsulfonyl, (4-methylphenyl)sulfonyl, C1-C18alkylsulfonyloxy, phenylsulfonyloxy, (4-methylphenyl)sulfonyloxy, C2-C18alkanoyl, C2-C18alkanoyloxy, benzoyl or by benzoyloxy;
- and
- Ar is phenyl, biphenylyl, fluorenyl, naphthyl, anthracyl, phenanthryl, or heteroaryl, wherein the phenyl, biphenylyl, fluorenyl, naphthyl, anthracyl, phenanthryl, or heteroaryl are unsubstituted or substituted by one or more C3-C30cycloalkyl, C1-C18alkyl, C1-C10haloalkyl, C2-C12alkenyl, C4-C30cycloalkenyl, phenyl-C1-C3-alkyl,
- or are substituted by C2-C18alkyl which is interrupted by one or more O, S, NR7, O(CO), (CO)O, (CO)NR7 or NR7(CO),
- or are substituted by C3-C30cycloalkyl which is interrupted by one or more O, S, NR7, O(CO), (CO)O, (CO)NR7 or NR7(CO),
- or are substituted by C4-C30cycloalkenyl which is interrupted by one or more O, S, NR7, O(CO), (CO)O, (CO)NR7 or NR7(CO),
- or are substituted by one or more halogen, NO2, CN, phenyl, biphenylyl, naphthyl, heteroaryl, (CO)R8, (CO)OR4, (CO)NR5R6, O(CO)R8, O(CO)OR4, O(CO)NR5R6, NR7(CO)R8, NR7(CO)OR4, OR4, NR5R6, SR7, SOR8, SO2R8 or OSO2R8, optionally the substituents C1-C18alkyl, C2-C12alkenyl, (CO)R8, (CO)OR4, (CO)NR5R6, O(CO)R8, O(CO)OR4, O(CO)NR5R6, NR7(CO)R8, NR7(CO)OR4, OR4, NR5R6, SR7, SOR8, SO2R8 or OSO2R8, form 5-, 6- or 7-membered rings, via the radicals C1-C18alkyl, C2-C12alkenyl, R4, R5, R6, R7 or R8, with further substituents on the phenyl, biphenylyl, fluorenyl, naphthyl, anthracyl, phenanthryl or heteroaryl or with one of the carbon atoms of phenyl, biphenylyl, fluorenyl, naphthyl, anthracyl, phenanthryl, or heteroaryl.
53 more elements
Dependencies are inferred from the claim text.