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US 9,005,539 B2Granted
Chamber sealing member
AssigneeASM IP Holding B.V.
InventorsMichael Halpin, Eric Shero, Carl White, Fred Alokozai, Jerry Winkler, Todd Dunn
Life of this patent
Estimating the term…
Abstract
A reaction chamber including an upper region for processing a substrate, a lower region for loading a substrate, a susceptor movable within the reaction chamber, a first sealing member positioned on a perimeter of the susceptor, a second sealing member positioned between the upper region and the lower region, wherein the first and second sealing members are selectively engaged with one another to limit communication between the upper region and the lower region.
Claims23
A reaction chamber comprising:
- an upper region for processing a substrate;
- a lower region for loading a substrate;
- a susceptor movable within the reaction chamber;
- a first sealing member positioned on a perimeter of the susceptor;
- a second sealing member positioned between the upper region and the lower region;
- wherein the first and second sealing members are selectively engaged with one another to limit communication between the upper region and the lower region;
- wherein the second sealing member is flexible and the first sealing member deflects the second sealing member when the susceptor is in a processing position, and
- wherein the second sealing member further comprises a plurality of notches.
5 more elements
A reaction chamber comprising:
- an upper region for processing a substrate;
- a lower region for loading a substrate;
- a susceptor movable within the reaction chamber;
- a first sealing member positioned on a perimeter of the susceptor;
- a second sealing member positioned between the upper region and the lower region;
- wherein the first and second sealing members are selectively engaged with one another to limit communication between the upper region and the lower region;
- wherein the second sealing member is flexible and the first sealing member deflects the second sealing member when the susceptor is in a processing position, and
- wherein the second sealing member further comprises a plurality of radially aligned slits.
5 more elements
Dependencies are inferred from the claim text.