# US 9,005,414 B2 · Magnet arrangement for a target backing tube, target backing tube including the same, cylindrical target assembly and sputtering system > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 9,005,414 B2 - Document ID: US9005414B2 - Status: Granted - Kind: B2 - Application number: 12/840,021 - Filed: 2010-07-20 - Published: 2012-01-19 - Granted: 2015-04-14 - Earliest claimed: 2010-07-16 - Assignees: Applied Materials, Inc. - Applicants: Andreas Lopp; Juergen Grillmayer; Wolfgang Krock - Inventors: Andreas Lopp; Juergen Grillmayer; Wolfgang Krock - Web page: https://patentgrep.com/patent/US9005414B2 ## CPC - H01J 37/3405: {Magnetron sputtering} - H01J 37/342: {Hollow targets} - H01J 37/345: {Magnet arrangements in particular for cathodic sputtering apparatus (material of magnets or magnets in general H01F1/00, H01F7/00)} - H01J 37/3452: {Magnet distribution} - H01J 37/3461: {Means for shaping the magnetic field, e.g. magnetic shunts} - H01J: ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS (spark-gaps H01T; electric arc lamps H05B31/00; particle accelerators H05H) ## Abstract The disclosure relates to a magnet arrangement for a sputtering system, wherein the magnet arrangement is adapted for a rotatable target of a sputtering system and includes: a first magnet element extending along a first axis; a second magnet element being disposed around the first magnet element symmetrically to a first plane; wherein the second magnet element includes at least one magnet section intersecting the first plane; and wherein a magnetic axis of the at least one magnet section is inclined with respect to a second plane being orthogonal to the first axis. Further, the disclosure relates to a target backing tube for a rotatable target of a sputtering system, a cylindrical rotatable target for a sputtering system, and a sputtering system. ## Claims ### Claim 1 A magnet arrangement for a sputtering system having a rotatable target, wherein the magnet arrangement comprises: a first magnet element extending along a first axis, wherein the first magnet element has, in the direction of the first axis, a first end and a second end opposite to the first end; two second magnet elements, each second magnet element extending in parallel to the first axis and being symmetrically arranged on opposite sides to the first axis, wherein each second magnet element has a first end and second end; wherein the first end of each second magnet element is arranged on a side of the first end of the first magnet element; and wherein the second end of each second magnet element is arranged on a side of the second end of the first magnet element; a third magnet element connecting the first ends of the two second magnet elements; and a fourth magnet element connecting the second ends of the two second magnet elements, such that the second magnet elements, the third magnet element, and the fourth magnet element surround the first magnet element; wherein a magnetic axis of the third magnet element is inclined with respect to a first plane being orthogonal to the first axis; and wherein either: the magnetic axis of the two second magnet elements are anti-parallel to the magnetic axis of the first magnetic element within the rotatable target; or the magnetic axis of the two second magnet elements are perpendicular to the surface of the rotatable target. ### Claim 2 (depends on 1) The magnet arrangement according to claim 1, wherein the magnetic axis of the third magnet element has an inclination angle greater than about 80 degrees with respect to the first plane. ### Claim 3 (depends on 1) The magnet arrangement according to claim 1, wherein magnetic axis of the third magnet element is tilted away from the first magnet element. ### Claim 4 (depends on 1) The magnet arrangement according to claim 1, wherein the first axis lies in a second plane, wherein the second plane is perpendicular to the first plane. ### Claim 5 (depends on 1) The magnet arrangement according to claim 1, wherein the magnetic axis of the third magnet element has an inclination angle of greater than about 60 degrees with respect to a magnetic axis of the two second magnet elements extending in parallel to the first axis of the first magnet element. ### Claim 6 (depends on 1) The magnet arrangement according to claim 1, wherein the magnetic axis of the third magnet element has an inclination angle of greater than about 80 degrees with respect to a magnetic axis of the two second magnet elements extending in parallel to the first axis of the first magnet element. ### Claim 7 (depends on 4) The magnet arrangement according to claim 4, wherein the third magnet element extends symmetrically on both sides of the second plane. ### Claim 8 (depends on 1) The magnet arrangement according to claim 1, wherein the form of the third magnet element is selected from the group consisting of a substantially U-shape, a half-circle, an arc of a circle, and a bar. ### Claim 9 (depends on 1) The magnet arrangement according claim 1, wherein the third magnet element corresponds to at least 30 percent of an extension of the two second magnet elements in a direction orthogonal to the first axis and orthogonal to a magnetic axis of the first magnetic element. ### Claim 10 (depends on 1) The magnet arrangement according claim 1, wherein the third magnet element corresponds to at least 50 percent of an extension of the two second magnet elements in a direction orthogonal to the first axis and orthogonal to a magnetic axis of the first magnetic element. ### Claim 11 (depends on 1) The magnet arrangement according to claim 1, wherein a magnetic axis of the fourth magnet element is inclined with respect to the first plane being orthogonal to the first axis. ### Claim 12 (depends on 1) The magnet arrangement according to claim 1, further comprising: a target backing tube having a longitudinal axis, wherein the target backing tube contains the magnet arrangement wherein the first axis is parallel to the longitudinal axis of the backing tube. ### Claim 13 (depends on 11) The magnet arrangement according to claim 11, wherein the magnetic axis of the fourth magnet element has an inclination angle greater than about 45 degrees with respect to the first plane being orthogonal to the first axis. ### Claim 14 (depends on 11) The magnet arrangement according to claim 11, wherein the magnetic axis of the fourth magnet element is tilted away from the first magnet element. ### Claim 15 (depends on 4) The magnet arrangement according to claim 4, wherein a magnetic axis of the fourth magnet element is inclined with respect to the first plane being orthogonal to the first axis. ### Claim 16 (depends on 11) The magnet arrangement according to claim 11, wherein the magnetic axis of the fourth magnet element has an inclination angle of greater than about 45 degrees with respect to the magnetic axis of second magnet element extending in parallel to the first magnet element. ### Claim 17 (depends on 1) The magnet arrangement according to claim 1, further comprising: a target backing tube, wherein the target backing tube has a longitudinal axis, wherein the target backing tube contains a magnet arrangement and the magnet arrangement is cylindrical, wherein the first axis is parallel to the longitudinal axis of the target backing tube, and further comprising at least one target cylinder being disposed around the target backing tube. ### Claim 18 (depends on 1) A cylindrical rotatable target for a sputtering system, wherein the cylindrical rotatable target has a longitudinal axis, wherein the cylindrical rotatable target contains a magnet arrangement according to claim 1, wherein the first axis is parallel to the longitudinal axis of the cylindrical rotatable target. ### Claim 19 (depends on 1) A sputtering system comprising: a vacuum chamber and at least one cylindrical rotatable target including a longitudinal axis, wherein the cylindrical rotatable target contains a magnet arrangement according to claim 1, wherein the first axis is parallel to the longitudinal axis of the cylindrical rotatable target, wherein the cylindrical rotatable target is disposed in the vacuum chamber. ### Claim 20 (depends on 1) The magnet arrangement according to claim 1, wherein the magnetic axis of the third magnet element has an inclination angle greater than about 45 degrees with respect to the first plane being orthogonal to the first axis. ### Claim 21 (depends on 1) The magnet arrangement according to claim 1, wherein the magnetic axis of the third magnet element has an inclination angle greater than about 60 degrees with respect to the first plane.