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AssigneeFraunhofer-Gesellschaft zur Foerderung der angewandten Forschung e.V.
InventorsDaniela Steffes-Lai, Lialia Nikitina, Tanja Clees
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A process simulation database includes process simulation data of a plurality of process simulations based on a different variation of a plurality of process parameters. For each process parameter, for an initial number of different process parameter values, process simulation data of a process simulation are included in the process simulation database. A process parameter classifier calculates a linearity indicator for a varied process parameter based on an analysis of the process simulation database with respect to a linearity of an influence of a variation of at least the varied process parameter on the process simulation data in the process simulation database. Further, a process simulation data processor changes the initial number of different process parameter values of the varied process parameter, for which process simulation data of a process simulation are included in the process simulation database, based on the calculated linearity indicator, to obtain a processed process simulation database.
An apparatus for processing a process simulation database of a process, comprising process simulation data of a plurality of process simulations of the process, wherein each process simulation of the plurality of process simulations is based on a different variation of a plurality of process parameters, wherein for each process parameter of the plurality of process parameters, for an initial number of different process parameter values, process simulation data of a process simulation are comprised in the process simulation database, comprising:
An apparatus for processing a process simulation database of a process, comprising process simulation data of a plurality of process simulations of the process, wherein each process simulation of the plurality of process simulations is based on a different variation of a plurality of process parameters, wherein for each process parameter of the plurality of process parameters, for an initial number of different process parameter values, process simulation data of a process simulation are comprised in the process simulation database, comprising:
A method for processing a process simulation database of a process comprising process simulation data of a plurality of process simulations of the process, wherein each process simulation or the plurality of process simulations is based on a different variation of a plurality of process parameters, wherein, for each process parameter of the plurality of process parameters, for an initial number of different process parameter values, process simulation data of the process simulation are comprised in the process simulation database, comprising:
A non-transitory computer readable medium including a computer program comprising a program code for performing a method, when the computer program runs on a computer or a microcontroller, for processing a process simulation database of a process comprising process simulation data of a plurality of process simulations of the process, wherein each process simulation or the plurality of process simulations is based on a different variation of a plurality of process parameters, wherein, for each process parameter of the plurality of process parameters, for an initial number of different process parameter values, process simulation data of the process simulation are comprised in the process simulation database, the method comprising:
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