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US 9,002,492 B2Granted
Methods and apparatuses for utilizing adaptive predictive algorithms and determining when to use the adaptive predictive algorithms for virtual metrology
AssigneeApplied Materials, Inc.
InventorJames Moyne
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Abstract
Described herein are methods, apparatuses, and systems for determining adaptive predictive algorithms for virtual metrology. In some embodiments, a computer implemented method identifies a plurality of predictive algorithms. The method determines when to use one or more of the plurality of predictive algorithms to predict one or more virtual metrology variables in a manufacturing facility.
Claims17
A computer implemented method including a processor and memory comprising:
- identifying a plurality of predictive algorithms;
- identifying an error switching threshold that is based on a comparison of predictions of metrology data and actual metrology data;
- determining when to invoke a first adaptive predictive algorithm, a second adaptive predictive algorithm, or both first and second adaptive predictive algorithms to predict one or more virtual metrology variables in a manufacturing facility based on the error switching threshold;
- invoking the first adaptive predictive algorithm for updating a first component vector that is a zero'th order term of a virtual metrology prediction equation if an error is greater than the error switching threshold;
- and
- subsequently invoking the second adaptive predictive algorithm for updating the first component vector and a second component vector that represents a matrix of the virtual metrology prediction equation, wherein the first adaptive predictive algorithm is different than the second adaptive predictive algorithm, wherein the virtual metrology prediction equation includes a predicted output that is based on an input factor, the first component vector, and the second component vector.
3 more elements
A computer-readable non-transitory storage medium comprising executable instructions to cause a processor to perform operations, the instructions comprising:
- identifying a plurality of predictive algorithms;
- identifying an error switching threshold that is based on a comparison of predictions of metrology data and actual metrology data;
- determining when to invoke a first adaptive predictive algorithm, a second adaptive predictive algorithm, or both first and second adaptive predictive algorithms to predict one or more virtual metrology variables in a manufacturing facility based on the error switching threshold;
- invoking the first adaptive predictive algorithm for updating a first component vector that is a zero'th order term of a virtual metrology prediction equation if an error is greater than the error switching threshold;
- and
- subsequently invoking the second adaptive predictive algorithm for updating the first component vector and a second component vector that represents a matrix of the virtual metrology prediction equation, wherein the first adaptive predictive algorithm is different than the second adaptive predictive algorithm, wherein the virtual metrology prediction equation includes a predicted output that is based on an input factor, the first component vector, and the second component vector.
3 more elements
A computer system comprising:
- a memory;
- and
- a processor, coupled to the memory, to:
- identify one or more of a plurality of predictive algorithms;
- identify an error switching threshold that is based on a comparison of predictions of metrology data and actual metrology data;
- determine when to invoke a first adaptive predictive algorithm, a second adaptive predictive algorithm, or both first and second adaptive predictive algorithms to predict one or more virtual metrology variables in a manufacturing facility based on the error switching threshold;
- invoke the first adaptive predictive algorithm for updating a first component vector that is a zero'th order term of a virtual metrology prediction equation if an error is greater than the error switching threshold;
- and
- subsequently invoke the second adaptive predictive algorithm for updating the first component vector and a second component vector that represents a matrix of the virtual metrology prediction equation, wherein the first adaptive predictive algorithm is different than the second adaptive predictive algorithm, wherein the virtual metrology prediction equation includes a predicted output that is based on an input factor, the first component vector, and the second component vector.
6 more elements
Dependencies are inferred from the claim text.