Method of manufacturing a three dimensional photonic device by two photon absorption polymerization
AssigneeInternational Business Machines Corporation
InventorsAntonio La Porta, Bert J Offrein, Ibrahim Murat Soganci
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Abstract
A method of manufacturing a three dimensional photonic device by two photon absorption polymerization. The method includes several stages, including direct laser writing involving polymerization by two-photon absorption to manufacture a three dimensional photonic device integrating at least two distinct micro-optical components having two optical functions and being aligned with each other so that optical signal can be transmitted from one of said distinct components to the other. The distinct components are built at a same stage of the process flow to improve their relative alignment by direct laser writing involving polymerization by two-photon absorption.
Claims17
Method of manufacturing a three dimensional photonic device according to a process flow that includes several manufacturing stages, the method comprising:
- fabricating at least two distinct micro-optical components by direct laser writing involving polymerization by two-photon absorption at a same manufacturing stage of said process flow:
- wherein said at least two distinct micro-optical components;
- are integrated within said three dimensional photonic device;
- have respective optical functions;
- and
- are aligned with each other such that an optical signal can be transmitted from one of said distinct components to another one of said distinct components;
- and
- wherein said manufacturing is performed by hybrid direct laser writing comprising:
- a first beam to perform said direct laser writing involving polymerization by two-photon absorption, to build three dimensional components;
- and
- a second beam, distinct from said first beam, to perform another direct laser writing involving polymerization by one-photon absorption, to build two dimensional components, both said beams being adapted to be used alternatively.
Method of manufacturing a three dimensional photonic device according to a process flow that includes several manufacturing stages, the method comprising:
- direct laser writing involving polymerization by two-photon absorption;
- alternative direct laser writing involving polymerization by one-photon absorption;
- and
- fabricating at least two distinct micro-optical components by direct laser writing involving polymerization by two-photon absorption at a same manufacturing stage of said process flow:
- wherein said at least two distinct micro-optical components are integrated within said three dimensional photonic device, have respective optical functions, and are aligned with each other such that an optical signal can be transmitted from one of said distinct components to another one of said distinct components;
- and
- wherein said three dimensional photonic device comprises at least a free space micro-optical component and at least a free space micro-optical component.
Method of manufacturing at least two distinct micro-optical components by direct laser writing comprising:
- polymerizing by two-photon absorption;
- integrating a three dimensional photonic device;
- presenting a concave shape along the direction (y) of the thickness of said three dimensional photonic device;
- and
- aligning said at least two-distinct micro-optical components such that an optical signal can be transmitted from one of said distinct components to another one of said distinct components;
- wherein said at least two distinct micro-optical components have respective optical functions;
- wherein said at least two distinct micro-optical components are manufactured at a same stage of a process flow of manufacturing said three dimensional photonic device;
- and
- wherein said manufacturing is performed by hybrid direct laser writing comprising;
- a first beam to perform said direct laser writing involving polymerization by two-photon absorption to build three dimensional components;
- and
- a second beam, distinct from said first beam, to perform another direct laser writing involving polymerization by one-photon absorption to build two dimensional components, both said beams being adapted to be used alternatively.
Dependencies are inferred from the claim text.