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US 9,002,037 B2Granted
MEMS structure with adjustable ventilation openings
AssigneeInfineon Technologies AG
InventorsAlfons Dehe, Matthias Herrmann, Ulrich Krumbein, Stefan Barzen, Wolfgang Klein, Wolfgang Friza, Martin Wurzer
Life of this patent
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Abstract
A MEMS structure includes a backplate, a membrane, and an adjustable ventilation opening configured to reduce a pressure difference between a first space contacting the membrane and a second space contacting an opposite side of the membrane. The adjustable ventilation opening is passively actuated as a function of the pressure difference between the first space and the second space.
Claims30
A MEMS structure comprising:
- a backplate;
- a membrane spaced a gap distance from the backplate;
- and
- an adjustable ventilation opening configured to reduce a pressure difference between a first space contacting a first side of the membrane and a second space contacting an opposite second side of the membrane, wherein the adjustable ventilation opening is passively actuated as a function of the pressure difference between the first space and the second space.
1 more element
A MEMS structure comprising:
- a backplate;
- a membrane spaced a gap distance from the backplate;
- and
- an adjustable ventilation opening comprising a cantilever on the membrane, the adjustable ventilation opening configured to reduce a pressure difference between a first space contacting the membrane and a second space contacting an opposite side of the membrane.
1 more element
A MEMS device comprising:
- a MEMS structure comprising a backplate and a membrane spaced a gap distance from the backplate;
- a housing enclosing the MEMS structure;
- a sound port acoustically coupled to the membrane;
- and
- an adjustable ventilation opening in the housing configured to reduce a pressure difference between a first space contacting the membrane and a second space,
- wherein the adjustable ventilation opening is passively actuated as a function of the pressure difference between the first space and the second space.
3 more elements
Dependencies are inferred from the claim text.