Method for fabricating side shields in a magnetic writer
AssigneeWestern Digital (Fremont), LLC
InventorsXianzhong Zeng, Mingjun Yu, Hai Sun, Donghong Li
Life of this patent
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Abstract
A method and system provide a magnetic transducer having an air-bearing surface (ABS) location, a pole and a gap. The pole has a bottom and a top wider than the bottom. The gap is on the top of the pole and at least as wide as the top of the pole such that an overhang is formed between a top edge of the gap and a bottom edge of the bottom of the pole. The method includes providing a plurality of bottom antireflective coatings (BARCs). The plurality of BARCs form a BARC layer that fills the overhang. A shield photoresist mask is provided on at least a portion of the BARC layer. The shield, which includes at least one side shield, is provided.
Claims15
A method for fabricating a shield for a magnetic transducer having air-bearing surface (ABS) location, a pole and a gap, the pole having a bottom and a top wider than the bottom, the gap residing on the top of the pole and being at least as wide as the top of the pole such that an overhang is formed between a top edge of the gap and a bottom edge of the bottom of the pole, the method comprising:
- providing a plurality of bottom antireflective coatings (BARCs), the plurality of BARCs forming a BARC layer, the BARC layer filling the overhang;
- providing a shield photoresist mask on at least a portion of the BARC layer;
- and
- providing the shield, the shield including at least one side shield.
A method for fabricating a shield for a magnetic transducer having air-bearing surface (ABS) location, a pole and a gap, the pole having a bottom and a top wider than the bottom such that an overhang is formed between a top edge of the top of the pole and a bottom edge of the bottom of the pole, the gap residing on the top of the pole and being at least as wide as the top of the pole, the method comprising:
- spin coating a first developable bottom antireflective coating (BARC) over the pole and the gap;
- spin coating a second developable BARC on the first developable BARC, a developable BARC (DBARC) layer including the first developable BARC and the second developable BARC filling the overhang;
- depositing a photoresist layer on the DBARC layer;
- selectively exposing a portion of the photoresist layer to light;
- removing the portion of the photoresist layer using a developer to provide a shield photoresist mask, a portion of the DBARC layer being removed by the developer;
- and
- plating a shield layer for the shield.
A magnetic transducer having air-bearing surface (ABS) comprising:
- a pole having a bottom and a top wider than the bottom;
- a write gap on the pole, the gap being at least as wide as the top of the pole such that an overhang is formed between a top edge of the gap and a bottom edge of the bottom of the pole, the overhang being free of photoresist residue;
- a side gap;
- and
- a shield including at least one side shield, the side gap separating the pole from the at least one side shield.
Dependencies are inferred from the claim text.