US 9,001,420 B2 · Microscope optical system and microscope system

Abstract

Provided is a microscope optical system in which the occurrence of flare due to unnecessary-order diffracted light exited from a diffractive optical element is suppressed. A microscope objective lens MS is configured by including an objective lens OL which has a diffractive optical element GD and converts light from an object into a substantially parallel light flux, and a second objective lens IL which forms an image of the object by focusing the substantially parallel light flux from the objective lens OL, and is configured such that, in case where an m-th order of diffracted light from the diffractive optical element GD is used for the image formation, the following expression is satisfied: |θ|>tan−1(0.06/D) when the light of a maximum NA emitted from the object located on an optical axis enters the diffractive optical element.

Claims10

Dependent claims

A microscope optical system comprising:

an objective lens which has a diffractive optical element and converts light from an object into a substantially parallel light flux;
and a second objective lens which forms an image of the object by focusing the substantially parallel light flux from the objective lens, wherein
in case where an m-th order diffracted light from the diffractive optical element is used for the image formation, the following expression is satisfied:
|θ|>tan−1(0.06/D) [Expression 10]
when the light of a maximum NA emitted from the object located on an optical axis enters the diffractive optical element, where θ is the incident angle on the second objective lens of the diffracted light having an order of diffraction different from the order of the m-th order diffracted light from the diffractive optical element, and D [mm] is a diameter of an entrance pupil to the second objective lens.

2 more elements

A microscope optical system comprising:

an objective lens which has a diffractive optical element and converts light from an object into a substantially parallel light flux;
and a second objective lens which forms an image of the object by focusing the substantially parallel light flux from the objective lens, wherein
the following expression is satisfied:
[
Expression
⁢
⁢
11
]

δ
⁢
⁢
θ

>

0.054
hdoe
⁢
f
⁢
⁢
1
D
⁢
cos
⁡
(
θ
⁢
⁢
doe
)
⁢
sin
⁢
⁢
(
θ
⁢
⁢
doe
)

where, among a plurality of orders of diffracted light from the diffractive optical element when the light of a maximum NA emitted from the object located on an optical axis enters the diffractive optical element,
δθ is a difference between an output angle of an necessary-order diffracted light used for the image formation and an output angle of an unnecessary-order diffracted light;
h is a height at which the necessary-order diffracted light used for the image formation exits;
θdoe is an output angle of the necessary-order diffracted light used for the image formation;
D [mm] is a diameter of an entrance pupil to the second objective lens;
and f1 is a focal length of the group of lenses, which are included in the objective lens, which are arranged on an image side from the diffractive optical element.

48 more elements

Dependencies are inferred from the claim text.

Microscope optical system and microscope system

Life of this patent

Microscope optical system and microscope system

Life of this patent

Abstract

Claims10