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US 9,001,412 B2Granted
Electromechanical device with optical function separated from mechanical and electrical function
AssigneeQUALCOMM MEMS Technologies, Inc.
InventorsClarence Chui, William Cummings, Brian James Gally, Lior Kogut, Ming-Hau Tung, Yeh-Jiun Tung, Chih-Wei Chiang, Denis Endisch
Life of this patent
Estimating the term…
Abstract
A microelectromechanical (MEMS) device includes a substrate, a movable element over the substrate, and an actuation electrode above the movable element. The movable element includes a deformable layer and a reflective element. The deformable layer is spaced from the reflective element.
Claims42
An electromechanical device comprising:
- a substrate;
- an actuation electrode;
- and
- a movable element between the substrate and the actuation electrode, the movable element including a deformable layer and a reflective element each being between the substrate and the actuation electrode, the deformable layer spaced from the reflective element along a direction generally perpendicular to the reflective element, wherein the movable element is configured to be selectively switched among at least a first state having a first spectral reflectance being a first color, a second state having a second spectral reflectance being a second color, and a third state having a third spectral reflectance being a black state,
- wherein the first state includes the reflective element in a relaxed position, wherein the second state includes the reflective element in a first actuated position, and wherein the third state includes the reflective element in a second actuated position,
- wherein the reflective element is movable to the second actuated position upon application of a voltage difference between the reflective element and a second actuation electrode, and
- wherein the reflective element is movable to at least one of the first actuated position and the second actuated position upon application of voltage potential differences both between the reflective element and the actuation electrode and between the reflective element and the second actuation electrode.
4 more elements
An electromechanical device comprising:
- means for moving a portion of the device, the moving means including means for deforming and means for reflecting, the deforming means spaced from the reflecting means along a direction generally perpendicular to the reflecting means;
- means for supporting the moving means;
- and
- means for actuating the moving means, the moving means including both the deforming means and the reflecting means each being between the supporting means and the actuating means, wherein the moving means is configured to be selectively switched among at least a first state having a first spectral reflectance being a first color, a second state having a second spectral reflectance being a second color, and a third state having a third spectral reflectance being a black state,
- wherein the first state includes the reflecting means in a relaxed position, wherein the second state includes the reflecting means in a first actuated position, and wherein the third state includes the reflecting means in a second actuated position,
- wherein the reflecting means is movable to the second actuated position upon application of a voltage difference between the reflecting means and second means for actuating the moving means, and
- wherein the reflecting means is movable to at least one of the first actuated position and the second actuated position upon application of voltage potential differences both between the reflecting means and the actuating means and between the reflecting means and the second actuating means.
4 more elements
A method for modulating light, comprising:
- providing a display element including a substrate, a movable element, and an actuation electrode, the movable element including a deformable layer and a reflective element each being between the substrate and the actuation electrode, the deformable layer spaced from the reflective element along a direction generally perpendicular to the reflective element;
- applying a voltage to the actuation electrode, the voltage generating an attractive force on the movable element, thereby causing the movable element to move away from the substrate;
- and
- selectively switching the movable element among at least a first state having a first spectral reflectance being a first color, a second state having a second spectral reflectance being a second color, and a third state having a third spectral reflectance being a black state,
- wherein selectively switching the movable element among the first state includes switching the reflective element to a relaxed position, wherein selectively switching the movable element among at least the second state includes switching the reflective element to a first actuated position, and wherein selectively switching the movable element among at least the third state includes switching the reflective element to a second actuated position,
- wherein switching the reflective element to the second actuated position includes applying a voltage difference between the reflective element and a second actuation electrode, and
- wherein switching the reflective element to at least one of the first actuated position and the second actuated position includes applying voltage potential differences both between the reflective element and the actuation electrode and between the reflective element and the second actuation electrode.
4 more elements
Dependencies are inferred from the claim text.