Drawing apparatus, data processing method, and method of manufacturing article that transform partially overlapping regions using different transformation rules

A method of manufacturing an article, the method comprising:

• performing drawing on a substrate using a drawing apparatus;
• developing the substrate having undergone the drawing;
• and
• processing the developed substrate to manufacture the article,
• wherein the drawing apparatus performs drawing on a first partial region and a second partial region of the substrate, the first and second partial regions having an overlap region in which the first and second partial regions overlap each other, the apparatus comprising:
• a transformation device configured to transform first pattern data for the first partial region into first quantized pattern data in accordance with a first transformation rule, and to transform second pattern data for the second partial region into second quantized pattern data in accordance with a second transformation rule different from the first transformation rule;
• and
• a controller configured to control the drawing on the first partial region based on the first quantized pattern data, and to control the drawing on the second partial region based on the second quantized pattern data.