Low resistance wiring structure and liquid crystal display device using the same

A liquid crystal display device comprising:

• a first substrate;
• a gate electrode and a gate line, each comprised of a triple layer including a first wiring made of copper, a second wiring made of a barrier metal and a metal oxide film made of oxide of the barrier metal, formed on the first substrate,
• wherein the barrier metal comprises at least one pure metal material selected from a group consisting of molybdenum (Mo), tungsten (W), manganese (Mn), technetium (Tc), rhenium (Re), ferrum (Fe), ruthenium (Ru) and osmium (Os),
• wherein the second wiring is disposed under the first wiring, and the metal oxide film is disposed between the first wiring and the second wiring, the metal oxide film made of oxide of the barrier metal restraining electromigration of copper due to a potential difference between copper and the barrier metal,
• wherein the metal oxide film restrains a galvanic corrosion generated due to a potential difference with copper when the pure metal material instead of a metal alloy is used as the barrier metal layer,
• wherein the first wiring and the metal oxide film are patterned in the same shape as the second wiring to prevent spreading of copper to the first substrate;
• a first insulating layer on the first substrate with the gate electrode and the gate line formed thereon;
• an active pattern on the first insulating layer;
• a source electrode, a drain electrode and a data line on the first substrate with the active pattern formed thereon, and wherein the source electrode, the drain electrode and the data line are each comprised of the triple layer including the first wiring made of copper, the second wiring made of the barrier metal and the metal oxide film made of the oxide of the barrier metal;
• a second insulating layer on the first substrate with the source electrode, the drain electrode and the data line formed thereon;
• and
• a second substrate coupled to the first substrate in a facing manner.

A liquid crystal display device comprising:

• a first substrate on which are formed a thin film transistor (TFT), a data line and a gate line, wherein the TFT comprises a gate electrode, a source electrode, and a drain electrode, and further, wherein each of the source electrode, the drain electrode of the TFT and the data line comprises three layers including a first wiring made of copper, a second wiring made of a barrier metal and a metal oxide film made of oxide of the barrier metal between the first wiring and the second wiring;
• a first insulating layer deposited on the first substrate with the gate electrode and the gate line formed thereon, the first insulating layer deposited in a particular pattern;
• a second insulating layer deposited on the first substrate with the source electrode, the drain electrode, and the data line formed thereon, the second insulating layer deposited in the particular pattern;
• and
• a second substrate coupled to the first substrate in a facing manner.