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US 9,000,867 B2Granted
Acoustic wave device and module
AssigneeTaiyo Yuden Co., Ltd.
InventorYohei Shimizu
Life of this patent
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Abstract
An acoustic wave device includes: a support substrate composed of lithium tantalate in multi-polarization condition; an element substrate that is provided on an upper face of the support substrate and is composed of lithium tantalate, a lower face of the element substrate being jointed to the upper face of the support substrate; and a comb-like electrode that is provided on an upper face of the element substrate and excites an acoustic wave.
Claims9
An acoustic wave device, comprising:
- a support substrate composed of lithium tantalate in multi-polarization condition;
- an element substrate that is provided on an upper face of the support substrate and is composed of lithium tantalate, a lower face of the element substrate being joined to the upper face of the support substrate;
- and
- a comb-like electrode that is provided on an upper face of the element substrate and excites an acoustic wave,
- wherein domains that voluntarily polarizes are arrayed in the support substrate in random order.
2 more elements
An acoustic wave device, comprising:
- a support substrate composed of lithium tantalate in multi-polarization condition;
- an element substrate that is provided on an upper face of the support substrate and is composed of lithium tantalate, a lower face of the element substrate being joined to the upper face of the support substrate;
- and
- a comb-like electrode that is provided on an upper face of the element substrate and excites an acoustic wave,
- wherein a linear thermal expansion coefficient of the support substrate in parallel with a propagation direction of the acoustic wave is smaller than a linear thermal expansion coefficient of the support substrate in an X-axis.
2 more elements
An acoustic wave device, comprising:
- a support substrate composed of lithium tantalate in multi-polarization condition;
- an element substrate that is provided on an upper face of the support substrate and is composed of lithium tantalate, a lower face of the element substrate being joined to the upper face of the support substrate;
- and
- a comb-like electrode that is provided on an upper face of the element substrate and excites an acoustic wave,
- wherein a sidewall of the acoustic wave device separated into a chip has no difference in level.
2 more elements
A module, comprising
- an acoustic wave device having a support substrate, an element substrate and a comb-like electrode,
- the support substrate being composed of lithium tantalate in multi-polarization condition,
- the element substrate being provided on an upper face of the support substrate and being composed of lithium tantalate,
- a lower face of the element substrate being joined to the upper face of the support substrate,
- the comb-like electrode being provided on an upper face of the element substrate and exciting an acoustic wave,
- wherein domains that voluntarily polarizes are arrayed in the support substrate in random order.
3 more elements
Dependencies are inferred from the claim text.