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US 9,000,851 B1Granted
Cavity resonators integrated on MMIC and oscillators incorporating the same
AssigneeHittite Microwave Corporation
InventorsEkrem Oran, Ahmed Ibrahim, Michael Koechlin
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Abstract
A cavity resonator integrated on a monolithic microwave integrated circuit (MMIC) is provided. The cavity resonator includes a cavity defined by an upper metal surface and a lower metal surface embedded in a low conductivity semiconductor, and a plurality of discrete metal connections coupled between the upper and lower metal surfaces, and at least one port for coupling to the cavity electromagnetically.
Claims20
A semiconductor-based monolithic microwave integrated circuit (MMIC), comprising:
- a cavity resonator comprising:
- a cavity defined by an upper metal surface and a lower metal surface, the cavity being a low conductivity semiconductor material;
- a plurality of discrete metal connections coupled between the upper and lower metal surfaces;
- and
- at least one port for coupling to the cavity electromagnetically, and one or more active devices.
2 more elements
An oscillator comprising:
- a semiconductor-based monolithic microwave integrated circuit (MIMIC);
- a cavity resonator, including:
- a cavity defined by an upper metal surface and a lower metal surface, the cavity being a low conductivity semiconductor material,
- a plurality of discrete metal connections coupled between the upper and lower metal surfaces;
- and
- a first pair of ports for coupling to the cavity electromagnetically;
- and
- a first amplifier coupled between the first pair of ports of the cavity resonator in a first feedback loop,
- wherein the semiconductor-based MMIC includes:
- the cavity resonator;
- and
- the first amplifier.
9 more elements
Dependencies are inferred from the claim text.