Compensation of changes in MEMS capacitive transduction

A method of compensating for strain on a microelectromechanical system (MEMS) device comprising:

• generating a signal indicative of a strain on the MEMS device in a first mode of operating a system including the MEMS device in a first mode of operating a system including the MEMS device, wherein generating the signal comprises:
• comparing an indicator of a resonant frequency of the MEMS device to a predetermined resonant frequency of the MEMS device;
• determining the predetermined resonant frequency prior to attaching a substrate including the MEMS device to a second substrate;
• and generating the indicator of the resonant frequency after attaching the substrate including the MEMS device to the second substrate;
• and compensating for the strain in a second mode of operating the system based on the signal.

An integrated circuit comprising:

• a microelectromechanical system (MEMS) device comprising:
• first structures configured to operate as first plates of capacitive electrodes in the first mode of operation and configured to be inoperable in the second mode of operation, a resonance mode of the MEMS device having a first strain sensitivity in the first mode of operation;
• and second structures configured to operate as the first plates of the capacitive electrodes coupled to the strain sensor in the second mode of operation and configured to be inoperable in the first mode of operation, the resonance mode of the MEMS device having a second strain-sensitivity in the second mode of operation, the first sensitivity being less than the second strain sensitivity;
• a strain sensor configured to generate a signal indicative of a strain on the MEMS device in a first mode of operation of the integrated circuit;
• and a control circuit configured to provide a strain-compensating signal based on the signal in a second mode of operation of the integrated circuit.