Thrust generation mechanism, drive device, XY stage and XYZ stage

Abstract

A thrust generation mechanism includes magnetic pole teeth which are arranged so as to sandwich and hold permanent magnets disposed on movers, cores which serially connect the magnetic pole teeth which sandwich and hold the magnets, armature winding wires which are collectively wound around the cores, and the movers having the magnets arranged such that the different magnetic poles thereof alternately face the front side and the rear side. The magnetic pole teeth which are arranged so as to sandwich and hold the permanent magnets and the armature iron cores which have cores serially connecting the magnetic pole teeth which hold the magnets are arranged in the longitudinal direction of the movers, and armature iron cores have a common winding wire. A stage is provided with a small-sized lightweight drive device which comprises magnetic pole teeth which are arranged on both sides of each permanent magnet with gaps therebetween, cores which connect the magnetic pole teeth, armatures which have armature winding wires wound around the magnetic pole teeth, and a row of the permanent magnets which is arranged such that the different magnetic poles are arranged alternately. The small-sized lightweight drive device is configured so that the number of the magnetic poles of the armatures is changed according to a thrust pattern required by the drive device.

Dependencies are inferred from the claim text.