Anti-fuse array of semiconductor device and method for forming the same
AssigneeSK hynix Inc.
InventorMin Chul Sung
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Abstract
An anti-fuse array of a semiconductor device and a method for forming the same are disclosed. The anti-fuse array for a semiconductor device includes a first-type semiconductor substrate formed to define an active region by a device isolation region, a second-type impurity implantation region formed in the active region, a first-type channel region isolated from the semiconductor substrate by the second-type impurity implantation region, a gate electrode formed over the channel region, and a first metal contact formed over the second-type impurity implantation region.
Claims11
An anti-fuse array comprising:
- a first-type semiconductor substrate formed to define an active region by a device isolation region;
- a second-type impurity implantation region formed in the active region;
- a first-type channel region isolated from the semiconductor substrate by the impurity implantation region;
- a gate electrode formed over the channel region;
- and
- a first metal contact formed over the second-type impurity implantation region.
An anti-fuse array for a semiconductor device comprising:
- a first junction region serving as a channel region and doped with a first dopant;
- a second junction region doped with a second dopant and configured to form a PN junction with the first junction region;
- a single gate electrode coupled to the first junction region;
- and
- a plurality of conductive bit line contacts coupled to the second junction region,
- wherein the plurality of conductive contacts are configured to be coupled to the single gate electrode through the PN junction under a fuse repair condition,
- wherein the first junction region extends along a first line, and
- wherein the second junction region is provided along sidewalls of the first junction region and a bottom of the first junction region so that the first junction region is separated from a substrate.
Dependencies are inferred from the claim text.