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US 9,000,547 B2Granted
Strain sensor and method for manufacturing the same
AssigneeKabushiki Kaisha Toshiba
InventorsYusaku Asano, Kazuhito Higuchi, Takeshi Miyagi, Yoshihiro Higashi, Michiko Hara, Hideaki Fukuzawa, Masayuki Kii, Eizo Fujisawa
Life of this patent
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Abstract
According to one embodiment, a strain sensor includes a substrate, a lid, a frame, and a sensing unit. The substrate has a first surface. The lid is provided on the first surface. The frame is provided between the substrate and the lid. The frame is nonconductive and includes a magnetic body. The sensing unit is provided inside the frame between the substrate and the lid, and includes a magnetoresistance effect element.
Claims20
A strain sensor, comprising:
- a substrate having a first surface;
- a lid provided on the first surface;
- a frame provided between the substrate and the lid, the frame being nonconductive and including a magnetic body;
- and
- a sensing unit provided inside the frame between the substrate and the lid, the sensing unit including a magnetoresistance effect element.
2 more elements
A method for manufacturing a strain sensor, comprising:
- preparing a substrate material having a first surface;
- preparing a sensing unit including a magnetoresistance effect element;
- mounting the sensing unit on the first surface;
- coating a paste material onto the first surface around a periphery of the sensing unit, the paste material being nonconductive and including a magnetic body;
- mounting a lid material on the sensing unit with the paste material interposed;
- forming a frame by curing the paste material;
- and
- cutting the lid material, the frame, and the substrate material in a direction orthogonal to the first surface.
5 more elements
Dependencies are inferred from the claim text.