US 9,000,543 B2 · Combined sensor

Abstract

To provide a combined sensor that can detect a plurality of physical quantities. With the combined sensor, it is possible to realize, while maintaining performance, a reduction in size and a reduction in costs by increasing elements that can be shared among respective sensors. A weight M2 and a detection electrode DTE2 used in an angular-velocity detecting section are also used as a reference capacitive element of a Z-direction-acceleration detecting section configured to detect acceleration in a Z direction. That is, in the Z-direction-acceleration detecting section, a detection capacitive element including the weight M2 and the detection electrode DTE2 configuring the angular-velocity detecting section is used as a reference capacitive element for a detection capacitive element formed by a detection electrode DTE5 and a weight M4.

Claims14

Dependent claims

A combined sensor comprising:

(a) a first detecting section configured to grasp application of a first physical quantity as a change in capacitance of a first detection capacitive element;
and
(b) a second detecting section configured to grasp application of a second physical quantity as a change in capacitance of a second detection capacitive element, wherein
the combined sensor detects the first physical quantity on the basis of a difference between a detection signal obtained by converting the capacitance of the first detection capacitive element output from the first detecting section and a reference signal obtained by converting the capacitance of the second detection capacitive element output from the second detecting section.

1 more element

A combined sensor comprising:

(a) a first detecting section configured to grasp application of a first physical quantity as a change in capacitance of a first detection capacitive element;
(b) a second detecting section configured to grasp application of a second physical quantity as a change in capacitance of a second detection capacitive element;
and
(c) a reference capacitive element set as a reference for calculating a difference, wherein
the combined sensor detects the first physical quantity on the basis of a difference between a first detection signal obtained by converting the capacitance of the first detection capacitive element output from the first detecting section and a reference signal obtained by converting the capacitance of the reference capacitive element and detects the second physical quantity on the basis of a difference between a second detection signal obtained by converting the capacitance of the second detection capacitive element output from the second detecting section and the reference signal obtained by converting the capacitance of the reference capacitive element.

2 more elements

Dependencies are inferred from the claim text.

Combined sensor

Life of this patent

Combined sensor

Life of this patent

Abstract

Claims14