Semiconductor device and semiconductor device manufacturing method
AssigneeFujitsu Semiconductor Limited
InventorMasatoshi Fukuda
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AssigneeFujitsu Semiconductor Limited
InventorMasatoshi Fukuda
Estimating the term…
A semiconductor device includes: a semiconductor substrate; a first transistor which is formed on the semiconductor substrate and includes a source/drain region and a gate electrode; an insulating film which covers the source/drain region and the gate electrode of the first transistor; and a first contact plug which is formed in the insulating film and is connected to the source/drain region or the gate electrode of the first transistor, wherein the first contact plug includes a first column section which extends in a thickness direction of the insulating film and is in contact with the source/drain region or the gate electrode of the first transistor, and a first flange section which juts out from an upper portion of the first column section in a direction parallel to a surface of the insulating film, and an upper surface of the first flange section is planarized.
A semiconductor device comprising:
Dependencies are inferred from the claim text.