Back-illuminated solid-state image pickup device

A back-illuminated solid-state image pickup device comprising:

• a first conductivity type semiconductor substrate having a light incident surface at a back surface side;
• a second conductivity type semiconductor layer provided on an opposite side of the light incident surface of first conductive type semiconductor substrate;
• an insulating layer provided on the second conductive type semiconductor layer, a first interface being formed between the second conductivity type semiconductor layer and the insulating layer and
• a charge transfer electrode disposed on an opposite side of the first interface of the insulating layer, wherein
• the solid-state image pickup device is a charge coupled device,
• the first conductivity type semiconductor substrate and the second conductivity type semiconductor layer are comprised of silicon, and
• the first interface has an uneven surface comprised of a plurality of concaves distributed over the first interface,
• wherein
• the concaves continue smoothly, and
• the charge transfer electrode covers the plurality of concaves.