Roller mold manufacturing device and manufacturing method

A manufacturing method of a roller mold which is a roller-like die to transfer a pattern, comprising:

• allowing passage of electron beams emitted from an electron beam irradiation device through a mask provided with an opening to form a plurality of beams which perform simultaneous depiction on a resist;
• rotating the roller mold coated with the resist around a rotary shaft, and irradiating the roller mold with the electron beams passed through the mask;
• detecting a rotational runout displacement amount of the roller mold in the rotary shaft direction at the rotation;
• and
• allowing a depiction position on the resist of the roller mold by the electron beams to follow the roller mold based on the detection signal.

A manufacturing method of a roller mold which is a roller-like die to transfer a pattern, comprising:

• measuring a position of the roller mold by use of an absolute system treatable as a system which is not influenced by a temperature change, as a reference;
• measuring a position of a mask which allows passage of some of electron beams emitted from an electron beam irradiation device, further by use of the absolute system as a reference;
• detecting a relative misalignment amount based on a difference between the position of the roller mold or the position of the mask and the absolute system, when a relative position misalignment between the roller mold and the mask occurs;
• and
• moving at least one of the roller mold and the mask to minimize the misalignment of a depiction position on the resist of the roller mold by the electron beams.

A manufacturing device of a roller mold which is a roller-like die to transfer a pattern, comprising:

• an electron beam irradiation device which irradiates the roller mold coated with a resist with electron beams;
• a mask which has an opening that allows passage of some of the electron beams emitted from the electron beam irradiation device, and which forms a plurality of beams that perform simultaneous depiction on the resist;
• a roller support jig which supports the roller mold;
• a rotation drive device which rotates the roller mold around a rotary shaft;
• an absolute system treatable as a system which is not influenced by a temperature change;
• a mask position measurement sensor which measures a position of the mask by use of the absolute system as a reference;
• a roller mold position measurement sensor which measures a position of the roller mold by use of the absolute system as a reference;
• a control device which receives measurement signals from the roller mold position measurement sensor and the mask position measurement sensor, and transmits a control signal to minimize misalignment of a depiction position on the resist of the roller mold by the electron beams;
• and
• an actuator which moves at least one of the roller mold and the mask based on the control signal from the control device, and moves the depiction position by the electron beams.