Adsorbent for removing metal compounds and method for same
AssigneeL'Air Liquide, Societe Anonyme pour l'Etude et l'Exploitation des Procedes Georges Claude
InventorsYoichi Sakata, Haruto Wakabayashi, Kazutaka Yanagita
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Abstract
Disclosed are effective and simple adsorbents and methods of using the adsorbents for removing metal impurities generated during storage, transportation and supply of organometallic compounds. The disclosed adsorbents and methods provide for the easy and effective removal of the metallic impurities or compounds generated from decomposition of the organometallic compound during its transportation, storage, and supply. Namely, the disclosed adsorbents and methods permit the stable supply of a high purity organometallic compound desired in the semiconductor and photovoltaic cell.
Claims10
A method for removing metallic compounds generated from the decomposition of an organometallic compound during the storage, transportation, and supply of the organometallic compound, comprising:
- contacting an organometallic compound that generates a metallic compound from decomposition of the organometallic compound with a metal adsorbent made of metal, wherein at least a portion of the metallic compound is removed from the liquid organometallic compound by the metal adsorbent.
Dependencies are inferred from the claim text.