Method and apparatus for manufacturing organic el device
AssigneeNitto Denko Corporation
InventorsRyohei Kakiuchi, Satoru Yamamoto, Kanako Hida
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AssigneeNitto Denko Corporation
InventorsRyohei Kakiuchi, Satoru Yamamoto, Kanako Hida
Estimating the term…
Provided are a method and an apparatus for manufacturing an organic EL device which enable deposition of a vaporized material from an evaporation source onto a substrate in a desired pattern, while eliminating the need for a conventional strip-shaped shadow mask. A shielding portion 51 is configured to be switchable between a shield position where the shielding portion 51 is arranged between an evaporation source 4 and a substrate 81 so as to shield the substrate 81 and a shield release position where the shielding portion 51 is withdrawn from between the evaporation source 4 and the substrate 81 so as to release the shielding of the substrate 81. The shielding portion 51 is switched between the shield position and the shield release position while rotating together with a roller 3.
A method for manufacturing an organic EL device, comprising the steps of:
An apparatus for manufacturing an organic EL device, comprising:
Dependencies are inferred from the claim text.