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US 8,999,734 B2Granted
Cyclic amino compounds for low-k silylation
AssigneeAmerican Air Liquide, Inc.
InventorsJames J. F. McAndrew, Curtis Anderson, Christian Dussarrat
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Abstract
Disclosed herein are mono-functional silylating compounds that may exhibit enhanced silylating capabilities. Also disclosed are method of synthesizing and using these compounds. Finally methods to determine effective silylation are also disclosed.
Claims15
A method of repairing a dielectric film previously damaged by a processing step(s), the method comprising the step of:
- contacting the dielectric film with a repair agent having a formula R3SiL, wherein each R is independently selected from the group consisting of H, methyl, and ethyl;
- L is a nitrogen-containing ring selected from the group consisting of 1,2,3-triazole, piperidine, 1-methylpiperazine, pyrolidine, and pyrazole;
- and one nitrogen in the nitrogen-containing ring is bonded directly to the Si atom, whereby the dielectric film is completely or partially restored.
Dependencies are inferred from the claim text.