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US 8,999,516 B2Granted
Polycrystalline silicon rod and process for production thereof
AssigneeWacker Chemie AG
InventorsMartin Weber, Erich Dornberger, Michael Kerscher, Heinz Kraus, Reiner Pech
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Abstract
The invention provides a polycrystalline silicon rod having a total diameter of at least 150 mm, including a core A having a porosity of 0 to less than 0.01 around a thin rod, and at least two subsequent regions B and C which differ in porosity by a factor of 1.7 to 23, the outer region C being less porous than region B.
Claims8
A polycrystalline silicon rod having a total diameter of at least 150 mm, comprising:
- a core A having a porosity of 0 to less than 0.01,
- which is around a thin rod;
- a region B around core A;
- and
- a region C around region B,
- wherein regions B and C differ in porosity by a factor of 1.7 to 23, and region C is less porous than region B.
3 more elements
Dependencies are inferred from the claim text.