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US 8,999,488 B2Granted
Optical member and method of manufacturing the same
AssigneeCanon Kabushiki Kaisha
InventorsZuyi Zhang, Hiroyuki Tanaka, Masayuki Yamada
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Abstract
An optical member includes an oxide layer that has a stable fine textured structure that is excellent in durability. The optical member includes a base material and an antireflection coating on a surface of the base material. The antireflection coating includes at least an oxide layer having a fine textured structure on the surface, and the oxide layer contains a phosphate compound. Furthermore, a method of manufacturing the optical member is provided.
Claims6
An optical member comprising:
- a base material;
- and
- an antireflection coating on a surface of the base material,
- wherein the antireflection coating comprises a metal oxide layer having an amorphous layer of aluminum oxide and a textured structure formed by crystallization of aluminum oxide on the surface of the amorphous layer,
- wherein a surface of the textured structure is made of aluminum phosphate by reaction of the crystallization of aluminum oxide and a phosphoric acid compound, and the amorphous layer has a dense layer containing aluminum phosphate, the dense layer being formed by reaction of the amorphous layer and phosphoric acid compound that penetrated gaps of the textured structure.
2 more elements
Dependencies are inferred from the claim text.