US 8,999,443 B2 · Method for fabricating a microarray of soft materials

Abstract

A method for fabricating a microarray of plural soft materials includes: vapor-depositing a first layer poly(para-xylylene) resin on a substrate, forming a first micro pattern in the poly(para-xylylene) resin; obtaining a substrate including a first microarray formed by pouring a first soft material solution, freeze-drying the first soft material to obtain a micro-arrayed substrate of the freeze-dried first soft material; vapor-depositing a second layer poly(para-xylylene) resin on the micro-arrayed substrate of the freeze-dried first soft material, forming a second micro pattern placed differently from the first micro pattern by penetrating the poly(para-xylylene) resin of the first and second layers, forming a second microarray on the substrate by pouring a second soft material solution; and forming a microarray of the first and second soft materials on the substrate by peeling off the poly(para-xylylene) resin of the first and second layers.

Claims12

Dependent claims

A method for fabricating a microarray of plural kinds of soft materials, the method comprising:

vapor-depositing a poly(para-xylylene) resin of a first layer on a substrate;
forming a first micro pattern in the poly(para-xylylene) resin;
forming a first microarray on a surface of the substrate by pouring a solution of a first soft material;
freeze-drying the first soft material so as to form a micro-arrayed substrate of the first soft material;
vapor-depositing and laminating a poly(para-xylylene) resin of a second layer on the micro-arrayed substrate of the first soft material that is freeze-dried;
forming a second micro pattern in a place different from the first micro pattern on the micro-arrayed substrate of the first soft material by penetrating the poly(para-xylylene) resin of the first layer and the second layer;
forming a second microarray on a surface of the substrate by pouring a solution of a second soft material;
and
peeling off the poly(para-xylylene) resin of the first layer and the second layer at the same time so as to form a micro-arrayed substrate of the first soft material that is freeze-dried and the second soft material.

6 more elements

A method for fabricating a microarray of plural kinds of soft materials, the method comprising:

vapor-depositing a poly(para-xylylene) resin of a first layer on a substrate;
forming a first micro pattern in the poly(para-xylylene) resin;
forming a first microarray on a surface of the substrate by pouring a solution of a first soft material;
peeling off the poly(para-xylylene) resin of the first layer from the substrate on which the first microarray is formed;
freeze-drying the first soft material so as to form a micro-arrayed substrate of the first soft material;
vapor-depositing and laminating a poly(para-xylylene) resin of a second layer on the micro-arrayed substrate of the first soft material that is freeze-dried;
forming a second micro pattern in a place different from the first micro pattern in the poly(para-xylylene) resin of the second layer;
forming a second microarray on the surface of the substrate by pouring a solution of a second soft material;
and
peeling off the poly(para-xylylene) resin of the second layer so as to form a micro-arrayed substrate of the first soft material that is freeze-dried and the second soft material.

7 more elements

A method for fabricating a microarray of plural kinds of soft materials, the method comprising:

vapor-depositing a poly(para-xylylene) resin of a first layer on a substrate;
forming a first micro pattern in the poly(para-xylylene) resin;
forming a first microarray on a surface of the substrate by pouring a solution of a first soft material;
freeze-drying the first soft material so as to form a micro-arrayed substrate of the first soft material;
peeling off the poly(para-xylylene) resin of the first layer from the substrate on which the first microarray is formed;
vapor-depositing and laminating a poly(para-xylylene) resin of a second layer on the micro-arrayed substrate of the first soft material that is freeze-dried;
forming a second micro pattern in a place different from the first micro pattern in the poly(para-xylylene) resin of the second layer;
forming a second microarray on the surface of the substrate by pouring a solution of a second soft material;
and
peeling off the poly(para-xylylene) resin of the second layer so as to form a micro-arrayed substrate of the first soft material that is freeze-dried and the second soft material.

7 more elements

Dependencies are inferred from the claim text.

Method for fabricating a microarray of soft materials

Life of this patent

Method for fabricating a microarray of soft materials

Life of this patent

Abstract

Claims12