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US 8,999,435 B2Granted
Process of producing grating for X-ray image pickup apparatus
AssigneeCanon Kabushiki Kaisha
InventorsYutaka Setomoto, Atsunori Terasaki
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Abstract
A process of producing a grating to be used in an X-ray image pickup apparatus includes the steps of preparing a grating having a plurality of protrusions periodically arranged, curving the grating in the direction in which the plurality of protrusions is arranged, and filling spaces between the protrusions with a metal in a state that the grating is curved.
Claims17
A process of producing a grating to be used in an X-ray image pickup apparatus, comprising the steps of:
- preparing a grating having a plurality of protrusions periodically arranged;
- and
- filling spaces between the protrusions with a metal,
- wherein the step of preparing the grating includes:
- forming a seed layer on one surface of a Si substrate, and
- forming the plurality of protrusions on the seed layer by etching the Si substrate to expose the seed layer.
3 more elements
Dependencies are inferred from the claim text.