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US 8,999,201 B2Granted
Graphene substituted with boron and nitrogen, method of fabricating the same, and transistor having the same
AssigneeSamsung Electronics Co., Ltd.
InventorsSung-hoon Lee, Sun-ae Seo, Yun-sung Woo, Hyun-jong Chung, Jin-seong Heo
Life of this patent
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Abstract
Graphene, a method of fabricating the same, and a transistor having the graphene are provided, the graphene includes a structure of carbon (C) atoms partially substituted with boron (B) atoms and nitrogen (N) atoms. The graphene has a band gap. The graphene substituted with boron and nitrogen may be used as a channel of a field effect transistor. The graphene may be formed by performing chemical vapor deposition (CVD) method using borazine or ammonia borane as a boron nitride (B-N) precursor.
Claims5
A transistor, comprising:
- a channel formed of graphene,
- wherein the graphene includes a structure of carbon (C) atoms partially substituted with boron (B) atoms and nitrogen (N) atoms, and
- the graphene has a band gap.
Dependencies are inferred from the claim text.