Fabrication of conducting open nanoshells
AssigneesImec, Katholieke Universiteit Leuven, KU LEUVEN R&D
InventorsWillem Jozef Katharina Van Roy, Jian Ye, Pol Van Dorpe
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Abstract
A method involving ion milling is demonstrated to fabricate open-nanoshell suspensions and open-nanoshell monolayer structures. Ion milling technology allows the open-nanoshell geometry and upward orientation on substrates to be controlled. Substrates can be fabricated covered with stable and dense open-nanoshell monolayer structures, showing nanoaperture and nanotip geometry with upward orientation, that can be used as substrates for SERS-based biomolecule detection.
Claims8
A method for fabricating a substrate having a layer thereon, said layer comprising nanoparticles, said nanoparticles comprising a conductive open shell, wherein substantially all of said nanoparticles have an open part of their shell away from said substrate, said method comprising the steps of:
- (i) providing nanoparticles comprising a dielectric core and a complete conductive shell around the core,
- (ii) depositing a layer of said nanoparticles on a substrate surface, and
- (iii) removing part of said conductive shell at an area of said nanoparticles away from said substrate surface thereby forming nanoparticles comprising a conductive open shell.
Dependencies are inferred from the claim text.