Method for manufacturing liquid discharge head
AssigneeCanon Kabushiki Kaisha
InventorsHiroyuki Abo, Keiji Matsumoto
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Abstract
A method for manufacturing a liquid discharge head includes a step of preparing a first substrate having an energy generating element at a front surface side thereof; a step of forming a wall member, which is to become a wall for a liquid flow passage, at the front surface side of the first substrate; a step of forming a mask having an opening on the wall member and forming a second substrate, which is composed of silicon and is to become an orifice plate, on the mask; and a step of forming a liquid supply port in the first substrate and a liquid discharge port in the second substrate by supplying an etchant from a back surface side of the first substrate, the back surface being a surface opposite the front surface.
Claims10
A method for manufacturing a liquid discharge head including a substrate having a liquid supply port;
- an energy generating element;
- and an orifice plate having a liquid discharge port, the method comprising:
- a step of preparing a first substrate having the energy generating element at a front surface side thereof;
- a step of forming a wall member, which is to become a wall for a liquid flow passage, at the front surface side of the first substrate;
- a step of forming a mask having an opening on the wall member and forming a second substrate, which is composed of silicon and is to become the orifice plate, on the mask;
- and
- a step of forming the liquid supply port in the first substrate and the liquid discharge port in the second substrate by supplying an etchant from a back surface side of the first substrate, the back surface being a surface opposite the front surface.
Dependencies are inferred from the claim text.