Biological sensor measuring electrochemical and/or electrical and diamond electrode and electronic integrated circuit
AssigneeCommissariat A L'energie Atomique Et Aux Energies Alternatives
InventorJean-Paul Mazellier
Life of this patent
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Abstract
A biological sensor for electrochemical and/or electrical measurement, including at least: a measurement electrode, able to make electrochemical and/or electrical measurements, and including a part of a doped diamond layer of a substrate comprising a stack including a dielectric layer placed between the doped diamond layer and a semiconductor material layer; an electronic circuit for amplifying and/or processing at least one electrical signal intended to be issued by the measurement electrode, electrically connected to the measurement electrode and made in a portion of the semiconductor material layer.
Claims11
A biological sensor for at least one of electrochemical and electrical measurements, comprising:
- a measurement electrode, able to make the at least one of electrochemical and electrical measurements, and including at least a part of a doped diamond layer of a substrate comprising a stack including at least one dielectric layer placed between the doped diamond layer and a semiconductor material layer;
- trenches that delimit the measurement electrode from the remainder of the doped diamond layer, the trenches being filled with at least one dielectric material and crossing at least the doped diamond layer;
- and
- an electronic circuit for at least one of amplifying and processing at least one electrical signal intended to be issued by the measurement electrode, the electronic circuit being different from the measurement electrode and electrically connected to the measurement electrode and made in a portion of the semiconductor material layer.
A biological sensor for at least one of electrochemical and electrical measurements, comprising:
- a measurement electrode, able to make the at least one of electrochemical and electrical measurements, and including at least a part of a doped diamond layer of a substrate comprising a stack including at least one dielectric layer placed between the doped diamond layer and a semiconductor material layer;
- and
- an electronic circuit for at least one of amplifying and processing at least one electrical signal intended to be issued by the measurement electrode, the electronic circuit being different from the measurement electrode, the electronic circuit being made in a portion of the semiconductor material layer, and the electronic circuit being electrically connected to the measurement electrode by through vias and at least one electrical interconnection layer composed of at least one electrically conductive material made into at least one passivation layer composed of at least one dielectric material, wherein
- the semiconductor material layer is placed between the diamond layer and the passivation layer, or
- the at least one passivation layer is placed against the semiconductor material layer, at least one hole being made through the at least one passivation layer and providing an access to the measurement electrode from outside of the sensor.
A biological sensor for at least one of electrochemical and electrical measurements, comprising:
- a measurement electrode, able to make the at least one of electrochemical and electrical measurements, and including at least a part of a doped diamond layer of a substrate comprising a stack including at least one dielectric layer placed between the doped diamond layer and a semiconductor material layer;
- and
- an electronic circuit for at least one of amplifying and processing at least one electrical signal intended to be issued by the measurement electrode, the electronic circuit being different from the measurement electrode, the electronic circuit being made in a portion of the semiconductor material layer, and the electronic circuit being electrically connected to the measurement electrode by through vias and at least one electrical interconnection layer composed of at least one electrically conductive material made into at least one passivation layer composed of at least one dielectric material, wherein
- the semiconductor material layer is placed between the diamond layer and the passivation layer, or
- the at least one passivation layer is placed against the semiconductor material layer, at least one hole being made through the at least one passivation layer and providing an access to the measurement electrode from outside of the sensor, the at least one hole not being filled with a material.
Dependencies are inferred from the claim text.