Film depositing apparatus

A film depositing apparatus comprising:

• a transport means that transports an elongated substrate in a specified transport path;
• a chamber;
• an evacuating unit that creates a specified degree of vacuum within the chamber;
• a rotatable drum that is provided within the chamber, that has an axis of rotation in a direction perpendicular to a transport direction of the substrate by the transport means, and around which the substrate transported by the transport means is wrapped in a specified surface region;
• a film depositing unit comprising a film depositing electrode spaced apart by a distance D from a surface of the drum and in a face-to-face relationship with the surface of the drum, said film depositing electrode having a first end at a most upstream direction of rotation of the drum and a second end at a most downstream direction of rotation of the drum a radio-frequency power source section for applying a radio-frequency voltage to the film depositing electrode, and a feed gas supply section from which a feed gas for forming a film is supplied into a gap between the drum and the film depositing electrode;
• an exhaust box, said exhaust box separately formed from the film depositing unit and disposed in a first direction parallel to the axis of the rotation of the drum and being longer than the electrode in the first direction and said exhaust box having a longitudinal opening oriented in the first direction and said longitudinal opening also being longer than the electrode in the first direction, said longitudinal opening also having a width dimension larger than the distance D, said exhaust box disposed such that the longitudinal opening faces at least one of the first end and the second end of the film depositing electrode;
• and
• a second exhaust box,
• wherein said second exhaust box separately formed from the film depositing unit and disposed in the first direction and being longer than the electrode in the first direction, and said second exhaust box having a second longitudinal opening oriented in the first direction and also being longer than the electrode in the first direction, said second longitudinal opening having a width dimension larger than the distance D, and said second exhaust box being disposed such that the second longitudinal opening faces the other of the first end and the second end of the film depositing electrode,
• wherein the second longitudinal opening is oriented away from the surface of the drum, and
• wherein the electrode has a second segment adjacent to the second end, and said electrode is disposed so that the second segment is parallel to a second tangent line to the surface of the drum, and wherein the second exhaust box is disposed so that the width dimension of the second longitudinal opening extends in a direction that is oriented to be parallel to a line running from the center of the drum to the second end of the electrode.