Capillary actuator deployment
AssigneeDigitalOptics Corporation MEMS
InventorsRoman C. Gutierrez, Robert J. Calvet, Xiaolei Liu
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AssigneeDigitalOptics Corporation MEMS
InventorsRoman C. Gutierrez, Robert J. Calvet, Xiaolei Liu
Estimating the term…
A method for making an actuator includes forming a substantially planar actuator device of an electrically conductive material, the device incorporating an outer frame, a fixed frame attached to the outer frame, a moveable frame disposed parallel to the fixed frame, a motion control flexure coupling the moveable frame to the outer frame for coplanar, rectilinear movement relative to the outer frame and the fixed frame, an actuator incorporating a plurality of interdigitated teeth, a fixed portion of which is attached to the fixed frame and a moving portion of which is attached to the moveable frame, moving the moveable frame to a deployed position that is coplanar with, parallel to and spaced a selected distance apart from the fixed frame, and fixing the moveable frame at the deployed position for substantially rectilinear, perpendicular movement relative to the fixed frame.
A device comprising an actuator, the actuator comprising:
A method for making a device, the method comprising:
A method, comprising:
Dependencies are inferred from the claim text.