US 8,998,068 B2 · Removal apparatuses for semiconductor chips

Abstract

A removal apparatus for a semiconductor chip may include a stage configured to support a board on which the semiconductor chip is mounted by bumps, a laser configured to irradiate a laser beam into the board over an area larger than the semiconductor chip, and a picker configured to cause the laser beam to penetrate the semiconductor chip locally and to separate the semiconductor chip from the board. A method of removing a semiconductor chip from a board may include loading the board, on which the semiconductor chip is mounted by bumps, on a stage; irradiating a laser beam into the semiconductor chip to melt the bumps and to separate the semiconductor chip from the board; continuously irradiating the laser beam into the board on which solder pillars, that are residues of the bumps, remain to melt the solder pillars; and removing the solder pillars.

Claims20

Dependent claims

A removal apparatus for a semiconductor chip, the removal apparatus comprising:

a stage configured to support a board on which the semiconductor chip is mounted by bumps;
a laser configured to irradiate a laser beam into the board over an area larger than the semiconductor chip;
a picker configured to cause the laser beam to penetrate the semiconductor chip locally and to separate the semiconductor chip from the board;
a vacuum portion configured to provide a vacuum to the picker;
and
an intake;
wherein the picker includes a lens configured to focus the laser beam on the semiconductor chip,
wherein the picker defines an open hole configured to cause the laser beam focused by the lens to penetrate the semiconductor chip,
wherein the vacuum provided from the vacuum portion draws the semiconductor chip to the open hole defined by the picker, and
wherein if solder pillars, which are residues of the bumps, are melted by the laser beam, the intake removes the solder pillars using the vacuum provided from the vacuum portion.

7 more elements

Dependencies are inferred from the claim text.

Removal apparatuses for semiconductor chips

Life of this patent

Removal apparatuses for semiconductor chips

Life of this patent

Abstract

Claims20