Delamination system

A delamination system for delaminating a laminated substrate, in which a first substrate and a second substrate are bonded together, into the first substrate and the second substrate, the laminated substrate disposed in an opening of a frame, the opening having a diameter larger than the laminated substrate, the laminated substrate being held by the frame with a non-bonding surface of the first substrate attached to a tape provided in the opening, the delamination system comprising:

• a first processing block configured to process at least one of the laminated substrate and the delaminated first substrate;
• and
• a second processing block configured to process the delaminated second substrate, wherein the first processing block comprises:
• a carry-in/carry-out station in which the laminated substrate held by the frame or the delaminated first substrate is placed, and configured to receive or carry out the laminated substrate or the delaminated first substrate;
• a first transfer device configured to transfer at least one of the delaminated first substrate and the laminated substrate placed in the carry-in/carry-out station;
• a delamination station including a delamination device configured to delaminate the laminated substrate transferred by the first transfer device into the first substrate and the second substrate;
• and
• a first cleaning station including a first cleaning device configured to clean the delaminated first substrate transferred by the first transfer device in a state where the delaminated first substrate is held by the frame, and
• wherein the second processing block comprises:
• a second cleaning station including a second cleaning device configured to clean the delaminated second substrate;
• a delivery station disposed between the second cleaning station and the delamination station, and configured to receive the delaminated second substrate from the delamination station and to deliver the delaminated second substrate to the second cleaning station;
• a second transfer device configured to transfer the second substrate cleaned by the second cleaning device;
• and
• a carry-out station in which the second substrate transferred by the second transfer device is placed,
• wherein the delivery station includes a third transfer device configured to hold the delaminated second substrate without making contact to the delaminated substrate and to transfer the delaminated second substrate, and
• the third transfer device is configured to turn upside down the second substrate held in a non-contact manner and then to deliver the second substrate to the second cleaning station.