Compound sensor

A compound sensor comprising:

• a first unit including first and second oscillators symmetrically disposed to each other and being able to be displaced in a driving direction and a detecting direction;
• a second unit including third and fourth oscillators symmetrically disposed to each other and being able to be displaced in the driving direction and the detecting direction;
• a drive unit configured to drive the first, second, third and fourth oscillators so as to oscillate the first and second oscillators in opposite phase to each other, and the third and fourth oscillators in opposite phase to each other, and so as to oscillate the first unit and the second unit in opposite phase to each other;
• a detection unit configured to detect displacements of the first, second, third and fourth oscillators in the detecting direction;
• and
• a processing unit configured to calculate an acceleration, an angular rate, an angular acceleration and a centrifugal force respectively and independently from the displacements of the first, second, third and fourth oscillators,
• wherein the drive unit and the detection unit respectively include first, second, third and fourth drive parts, and first, second, third and fourth detection parts respectively corresponding to the first, second, third and fourth oscillators,
• wherein the first, second, third and fourth detection parts respectively include detection electrodes to detect the displacements by increase and decrease of capacitance, the detection electrodes being made of comb-like plural fixed electrodes fixed to a supporting medium and plural movable electrodes disposed alternately opposite to each other;
• and
• wherein a positional relation in the detecting direction of an alternate arrangement between the fixed electrodes and the movable electrodes has an arrangement where the plural fixed electrodes and the plural movable electrodes generate only one of increase and decrease of the capacitance when the displacements occur, and has an arrangement where the detection parts corresponding to oscillators driven in opposite phase by the drive unit among the first, second, third and fourth oscillators make pairs of a common arrangement and each of the pairs has a different arrangement.