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US 8,997,565 B2Granted
Micro-mechanical sensor of angular velocity
AssigneeMurata Electronics Oy
InventorAnssi Blomqvist
Life of this patent
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Abstract
A micro-mechanical resonator is provided. The micro-mechanical resonator comprises two masses coupled in the direction of a common axis by a spring structure. The spring structure comprises a spring that couples at least a first bar connected to the masses and a second bar extending in the motion axis direction, said spring being arranged to bend in a direction perpendicular to the motion direction of the motion axis. A micro-mechanical resonator matrix, a sensor and a navigation device are also provided.
Claims11
A micro-mechanical resonator, comprising:
- a first mass and a second mass coupled to move on a common axis of motion by a spring structure that comprises a first bar, a second bar and a spring, wherein
- the spring is suspended to extend parallel to the common axis of motion,
- a first end of the first bar is coupled to the first mass and a second end of the first bar is coupled to the spring such that the first bar is turned by displacement of the first mass in the direction of the common axis of motion,
- a first end of the second bar is coupled to the second mass and a second end of the second bar is coupled to the spring such that the second bar is turned by displacement of the second mass in the direction of the common axis of motion, and
- the second end of the first bar and the second end of the second bar are directly coupled to the spring such that the spring is bent between them perpendicularly to the direction of the common axis of motion in response to turning of the first bar by displacement of the first mass on the common axis of motion and of the second bar by displacement of the second mass on the common axis of motion.
2 more elements
A system of micromechanical resonators, comprising:
- at least one micromechanical resonator that comprises a first mass and a second mass that are coupled to move on a common axis of motion with a spring structure that comprises a first bar, a second bar and a spring, wherein the spring is suspended to extends parallel to the common axis of motion,
- a first end of the first bar is coupled to the first mass and a second end of the first bar is coupled to the spring such that the first bar is turned by displacement of the first mass in the direction of the common axis of motion,
- a first end of the second bar is coupled to the second mass and a second end of the second bar is coupled to the spring such that the second bar is turned by displacement of the second mass in the direction of the common axis of motion, and
- the second end of the first bar and the second end of the second bar are directly coupled to the spring such that the spring is bent between them perpendicularly to the direction of the common axis of motion in response to turning of the first bar by displacement of the first mass on the common axis of motion and of the second bar by displacement of the second mass on the common axis of motion.
1 more element
Dependencies are inferred from the claim text.