US 8,997,320 B2 · Method for manufacturing acoustic wave device

Abstract

Provided is a method for manufacturing an acoustic wave device that has an excellent temperature coefficient of frequency (TCF) and high accuracy of IDT pattern forming and is capable of resisting high temperature processing of 200 degrees or more. The method for manufacturing an acoustic wave device according to the present invention includes forming an IDT (2) on a principal surface (1a) of a piezoelectric substrate (1), and forming a film by thermal spraying a material (3) having a smaller linear thermal expansion coefficient than the piezoelectric substrate onto an opposite principal surface (1b) of the piezoelectric substrate (1) where the IDT (2) is formed.

Claims12

Dependent claims

A method for manufacturing an acoustic wave device, comprising the steps of:

forming an inter-digital transducer on one principal surface of a piezoelectric substrate;
forming a porous film by spraying a material having a smaller linear thermal expansion coefficient than the piezoelectric substrate on a surface opposite to the principal surface of the piezoelectric substrate after forming the inter-digital transducer on the principal surface of the piezoelectric substrate;
and
filling pores in the porous film formed by spraying with a filling material.

1 more element

Dependencies are inferred from the claim text.

Facts

Application

12/864,060Filed 26 Nov 2008

Priority

JP 2008-01363324 Jan 2008

Published

US 2010/0293770 A125 Nov 2010

Granted

7 Apr 2015

Term ends

Not estimatedThe source records don’t support an estimate.

Classification14 codes

H03H 3/02
For the manufacture of electromechanical resonators or networks: for the manufacture of piezoelectric or electrostrictive resonators or networks
C23C 4/06
Characterised by the coating material: metallic material
H03H 3/007
Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators: for the manufacture of…
H03H 3/04
For the manufacture of piezoelectric or electrostrictive resonators or networks: for obtaining desired frequency or temperature coefficient

Method for manufacturing acoustic wave device

Life of this patent

Method for manufacturing acoustic wave device

Life of this patent

Abstract

Claims12